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Volumn 222, Issue 1-2, 2001, Pages 74-81

Nitrogen-doping effect in a fast-pulled Cz-Si single crystal

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH FROM MELT; DOPING (ADDITIVES); NITROGEN; OXIDATION; POINT DEFECTS; PRECIPITATION (CHEMICAL); SINGLE CRYSTALS; STACKING FAULTS;

EID: 0035147975     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00915-5     Document Type: Article
Times cited : (30)

References (21)
  • 1
    • 0006420277 scopus 로고
    • W.M. Bullis, & S.(E.), Broydo. Pennington, NJ: The Electrochemical Society Proceedings Series
    • Abe T., Masui T., Harada H., Chikawa J. Bullis W.M., Broydo S.(E.), VLSI Science and Technology. 1985;543 The Electrochemical Society Proceedings Series, Pennington, NJ.
    • (1985) VLSI Science and Technology , pp. 543
    • Abe, T.1    Masui, T.2    Harada, H.3    Chikawa, J.4
  • 17
    • 0001029984 scopus 로고
    • in: J.C. Mikkelsen et al., (Eds.), Material Research Society, Warrendale, PA
    • H.J. Stein, in: J.C. Mikkelsen et al., (Eds.), Symposia Proceedings, Vol. 59, Material Research Society, Warrendale, PA, 1985, p. 523.
    • (1985) Symposia Proceedings , vol.59 , pp. 523
    • Stein, H.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.