Oxygen precipitation in nitrogen-doped Czochralski-grown silicon crystals

Journal of Applied Physics

Volumn 89, Issue 8, 2001, Pages 4301-4309

  Nakai, Katsuhiko ^a   Inoue, Yoshiharu ^a   Yokota, Hideki ^a   Ikari, Atsushi ^a   Takahashi, Jun ^a   Tachikawa, Akiyoshi ^a   Kitahara, Kouichi ^a   Ohta, Yasumitsu ^a   Ohashi, Wataru ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035870960     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1356425     Document Type: Article

References (18)

1. J. Ryuta, E. Morita, T. Tanaka, and Y. Shimanuki, Jpn. J. Appl. Phys., Part 2 29, L1947 (1990).
2. W. K. Tice and T. Y. Tan, J. Appl. Phys. Lett. 28, 564 (1976).
3. M. Itsumi, M. Tomita, and M. Yamawaki, J. Appl. Phys. 78, 1940 (1995).
4. Y. Matsushita, M. Wakatsuki, and Y. Saito, 18th Conference on Solid State Devices & Materials, Tokyo, 1986, p. 529.
5. F. Shimura and R. S. Hockett, Appl. Phys. Lett. 48, 224 (1986).
6. A. Ikari, K. Nakai, T. Tachikawa, H. Deai, H. Yokota, Y. Ohta, N. Masahashi, S. Hayashi, T. Hoshino, and W. Ohashi, Solid State Phenom. 69-70 161 (1999).
7. M. Iida, W. Kusaki, M. Tamatsuka, E. Iino, M. Kimura, and S. Muraoka, Electrochem. Society 195th Meeting Extended Abstracts, 1999, p. 357.
8. K. Moriya, J. Cryst. Growth 94, 182 (1989).
9. W. Ohashi, A. Ikari, Y. Ohta, H. Yokota, A. Tachikawa, K. Ishizaka, H. Deai, T. Fulagi, J. Takahashi, Y. Inoue, and K. Nakai, Kazusa Academia Forum 1999, p. 99.
10. K. Nakai, H. Hasebe, W. Ohashi, and T. Sato, JAPS Spring Mtg. Proc. (in Japanese), 28p-ZB-8, 1999, p. 465.
11. E. M. Livindston, S. Messoloras, R. C. Newman, B. C. Pike, R. J. Stewart, M. J. Binns, W. P. Brown, and J. G. Wilkes, J. Phys. C 17, 6253 (1984).
12. N. Inoue, J. Osaka, and K. Wada, J. Electrochem. Soc. 129, 2780 (1982).
13. J. Burke, The Kinetics of Phase Transformation in Metals (Pergamon, London, 1965).
14. J. C. Mikkelesen, Mater. Res. Soc. Symp. Proc. 59, 19 (1986).
15. K. Wada and N. Inoue, J. Cryst. Growth 49, 749 (1980).
16. F. S. Ham, J. Phys. Chem. Solids. 6, 335 (1958).
17. A. Bourret, Mater. Res. Soc. Symp. Proc. 59, 223 (1986).
18. K. Nakai, M. Hasebe, T. Iwasaki, and Y. Tsumori, Mater. Res. Soc. Symp. Proc. 442, 113 (1996).