Two-dimensional fluid approach to the dc magnetron discharge

Plasma Sources Science and Technology

Volumn 14, Issue 1, 2005, Pages 168-176

  Costin, C ^a,b   Marques, L ^a,c   Popa, G ^b   Gousset, G ^a  

^a UNIVERSITÉ PARIS SUD   (France)

^b ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^c UNIVERSITY OF MINHO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; COMPUTER SIMULATION; ENERGY TRANSFER; MAGNETRONS; MATHEMATICAL MODELS; PLASMA DENSITY; PROBLEM SOLVING;

BOLTZMANN EQUATION; ENERGY TRANSFER EQUATIONS; ION MOMENTUM; MAGNETRON DISCHARGES;

ELECTRIC DISCHARGES;

EID: 14644432388     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/1/018     Document Type: Article

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