Two-dimensional self-consistent simulation of a DC magnetron discharge

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 4 A, 1999, Pages 2131-2136

  Shidoji, Eiji ^a   Ohtake, Hiroto ^b   Nakano, Nobuhiko ^b   Makabe, Toshiaki ^b  

^a ASAHI GLASS CO LTD   (Japan)

^b KEIO UNIVERSITY   (Japan)

Author keywords

Discharge; Hybrid model; Magnetron sputtering; Plasma; Simulation

Indexed keywords

EID: 0001012331     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.2131     Document Type: Article

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