Self-consistent particle simulation of three-dimensional dc magnetron discharge

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 1013-1016

  Nanbu, K ^a   Segawa, S ^a   Kondo, S ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

dc; Discharge plasma; Magnetron; Particle simulation

Indexed keywords

CATHODES; COMPUTER SIMULATION; ELECTRODES; EQUATIONS OF MOTION; FINITE DIFFERENCE METHOD; IONIZATION; MAGNETRON SPUTTERING; MAGNETRONS; MAGNETS; PLASMA DENSITY; PLASMA SHEATHS; PLASMAS;

CATHODE SHEATH; INDUSTRIAL SPUTTERING APPARATUS; SELF CONSISTENT PARTICLE SIMULATION; THREE DIMENSIONAL DC MAGNETRON DISCHARGE;

ELECTRIC DISCHARGES;

EID: 0030169933     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00114-5     Document Type: Article

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