Model of the cathode fall region in magnetron discharges

Plasma Sources Science and Technology

Volumn 6, Issue 4, 1997, Pages 524-532

  Bradley, J W ^a   Lister, G ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN GASES; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; ELECTRIC SPACE CHARGE; ELECTRON TRANSPORT PROPERTIES; IONS; MAGNETIC FIELD EFFECTS; MAGNETRONS; PLASMA CONFINEMENT; PLASMA FLOW; PLASMA SHEATHS;

BOHM DIFFUSION; CHILD LANGMUIR LAW; MAGNETRON DISCHARGES;

PLASMAS;

EID: 0031270788     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/4/010     Document Type: Article

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