Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures

Plasma Sources Science and Technology

Volumn 9, Issue 2, 2000, Pages 152-160

  Debal, F ^a   Wautelet, M ^a   Bretagne, J ^b   Dauchot, J P ^a   Hecq, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; ARGON; BINARY MIXTURES; CATHODES; ELECTRIC DISCHARGES; ELECTRON TRANSITIONS; ELECTRONS; EMISSION SPECTROSCOPY; LIGHT EMISSION; MAGNETIC FIELDS; MAGNETRON SPUTTERING; NITROGEN;

SPATIALLY RESOLVED SPECTROSCOPIC OPTICAL EMISSION;

PLASMA SOURCES;

EID: 0033750438     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/2/307     Document Type: Article

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