Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. II. Radio frequency-driven discharge

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 838-847

  Kondo, S ^a   Nanbu, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; GAS HEATING; IONIZATION; MONTE CARLO METHODS; PLASMA DENSITY; SPUTTERING;

PLANAR MAGNETRON DISCHARGES;

MAGNETOPLASMA;

EID: 0035335664     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1359535     Document Type: Article

References (32)