Two-dimensional nonlocal model of axially and radially inhomogeneous plasma of cylindrical magnetron discharge

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 68, Issue 1 2, 2003, Pages 164011-164019

  Porokhova, I A ^a,b   Golubovskii, Yu B ^b   Holik M ^a,c   Kudrna, P ^a,c   Tichy M ^a,c   Wilke, C ^a   Behnke, J F ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; IONIZATION; MAGNETIC FIELD EFFECTS; PLASMA INTERACTIONS;

CYLINDRICAL MAGNETRON DISCHARGES (CMD);

MAGNETRONS;

EID: 14644414374     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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