Analysis of three-dimensional DC magnetron discharge by the particle-in-cell/Monte Carlo method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4808-4814

  Nanbu, Kenichi ^a   Kondo, Shuji ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Direct current; Discharge; Magnetron; Particle simulation

Indexed keywords

CATHODES; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; MAGNETIC FIELD EFFECTS; MAGNETS; MONTE CARLO METHODS; PLASMA DENSITY; PLASMA SHEATHS; PRESSURE EFFECTS;

PARTICLE IN CELL METHOD;

MAGNETRONS;

EID: 0031177528     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4808     Document Type: Article

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