Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Plasma Sources Science and Technology

Volumn 13, Issue 3, 2004, Pages 409-419

  Seo, Sang Hun ^a   In, Jung Hwan ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DRIFT; ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); ELECTRON FLUX; ELECTRON-ELECTRON COLLISION;

ARGON; CARRIER CONCENTRATION; CATHODES; DISCHARGE LAMPS; ELECTRIC FIELDS; ELECTRON TRANSPORT PROPERTIES; ELECTRONS; MAGNETIC FIELDS; MAGNETRON SPUTTERING; PLASMA SOURCES; PRESSURE CONTROL;

ELECTRON ENERGY LEVELS;

EID: 4444262893     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/3/007     Document Type: Article

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