On the role of plasma-surface interactions in dc magnetron discharges in Ar-N2 gas mixtures

Plasma Sources Science and Technology

Volumn 10, Issue 1, 2001, Pages 30-37

  Debal, F ^a   Bretagne, J ^b   Dauchot, J P ^a   Hecq, M ^a   Wautelet, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; NITROGEN; SPUTTERING; SURFACE PHENOMENA;

MAGNETRON DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; PLASMA SURFACE INTERACTIONS;

PLASMAS;

EID: 0035249969     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/10/1/305     Document Type: Article

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