Analysis of a one-dimensional, steady-state magnetron discharge

Journal of Physics D: Applied Physics

Volumn 30, Issue 18, 1997, Pages 2573-2584

  Cramer, N F ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON DISCHARGE; NEGATIVE SPACE CHARGE; PARTICLE IN CELL SIMULATION; POSITIVE SPACE CHARGE;

ANODES; CATHODES; COMPUTER SIMULATION; ELECTRIC FIELDS; EQUATIONS OF MOTION; IONS; MAGNETIC FIELDS; MAGNETRONS; MONTE CARLO METHODS; PRESSURE;

ELECTRON TRANSPORT PROPERTIES;

EID: 0031235125     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/30/18/012     Document Type: Article

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