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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 830-837

Axisymmetrical particle-in-cell/Monte Carlo simulation of narrow gap planar magnetron plasmas. I. Direct current-driven discharge

(2) Kondo, S a Nanbu, K a

a TOHOKU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC FIELD EFFECTS; IONS; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MONTE CARLO METHODS; PLASMA DENSITY;

MAGNETRON PLASMAS;

MAGNETOPLASMA;

EID: 0035334358 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1359534 Document Type: Article

Times cited : (33)

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