Modelling of an Ar-O2 reactive magnetron discharge used for deposition of chromium oxide

Plasma Sources Science and Technology

Volumn 5, Issue 4, 1996, Pages 607-621

  Trennepohl Jr , W ^a   Bretagne, J ^a   Gousset, G ^a   Pagnon, D ^a   Touzeau, M ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; LIGHT; MAGNETRONS; OPTICS; PLASMAS; SPECTROSCOPY;

BOLTZMANN EQUATION; OPTICAL EMISSION;

PLASMA SOURCES;

EID: 0030282578     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/4/002     Document Type: Article

References (26)

1. Maniv S and Westwood W D 1980 J. Vac. Sci. Technol. 17 743
2. Touzeau M, Trennepohl W Jr, Pagnon D and Bretagne J Romanian J. Phys. at press
3. Guimarães F, Almeida J B and Bretagne J 1991 J. Vac. Sci. Technol. A 9 133
4. Guimarães F and Bretagne J 1993 Plasma Sources Sci. Technol. 2 127
5. Guimarães F, Almeida J B and Bretagne J 1993 Plasma Sources Sci. Technol. 2 138
6. Rossnagel S M and Kaufman H R 1987 J. Vac. Sci. Technol. A 5 2276
7. Bretagne J, Delouya G, Godart J and Puech V 1981 J. Phys. D: Appl. Phys. 14 1225
8. Bretagne J, Godart J and Puech V 1982 J. Phys. D: Appl. Phys. 15 2205
9. Bretagne J, Delouya G, Corse C, Capitelli M and Bacal M 1985 J. Phys. D: Appl. Phys. 18 811
10. Wiese W L, Smith M W and Glennon B M 1966 Atomic Transition Probabilities vol 1 (USA National Bureau of Standards)
11. Gousset G, Ferreira C M, Pinheiro M, Sá P A, Touzeau M, Vialle M and Loureiro J 1991 J. Phys. D: Appl. Phys. 24 290
12. Itikawa Y, Ichimura A, Onda K, Sakimoto K, Takayanagi K, Hatano Y, Hayashi M, Nishimura H and Tsurubuchi S 1989 J. Phys. Chem. Ref. Data 18 23
13. Eliasson B and Kogelschatz U 1986 Brown Boveri report KLR 86-11C
14. Rapp D and Briglia D D 1965 J. Chem. Phys. 43 1480
15. Eletskii A V and Smirnov M 1982 Sov. Phys.-Usp. 25 13
16. Henry R W J, Burke P G and Sinfailam A L 1969 Phys. Rev. 178 218
17. Laher R R and Gilmore F R 1990 J. Phys. Chem. Ref. Data 19 277
18. Drawin H W 1967 Report EUR-CEA-FC 383 (Fontenay-aux-Roses, France: Commissariat à l'Energie Atomique)
19. Fite W L and Brackmann R T 1959 Phys. Rev. 113 815
20. Schulman M B, Sharpton F A, Chung S, Lin C C and Anderson L W 1985 Phys. Rev. A 32 2100
21. Riemann K U 1991 J. Phys. D: Appl. Phys. 24 493
22. Lister G G private communication
23. Estocq E, Delouya G and Bretagne J 1993 Appl. Phys. B 56 209
24. Bieniewski T M 1976 Astrophys. J. 208 228
25. Martin G A, Fuhn J R and Wiese W L 1988 J. Phys. Chem. Ref. Data 17 suppl. 3
26. Tawara H and Kato T 1987 At. Data Nucl. Data Tables 36 167