Langmuir probe measurements of plasma parameters in a planar magnetron with additional plasma confinement

Vacuum

Volumn 55, Issue 2, 1999, Pages 165-170

  Špatenka, Petr ^a   Vlček, Jaroslav ^b   Blažek, Josef ^a  

^a UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; IONIZATION OF GASES; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; PLASMA CONFINEMENT; PLASMA PROBES;

LANGMUIR PROBES; PLASMA ELECTRON DENSITY; PLASMA ELECTRON TEMPERATURE;

SPUTTER DEPOSITION;

EID: 0345580805     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(99)00144-X     Document Type: Article

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