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Volumn 90, Issue 6, 2002, Pages 993-1004

Gallium nitride materials - Progress, status, and potential roadblocks

Author keywords

Aluminum gallium nitride (AlGaN); Defects; Dislocations; Dopants; Electron irradiation; Electron mobilities; Excitons; Fourier transform infrared (FTIR) absorption; Gallium nitride (GaN); Heteroepitaxy; Hydride vapor phase epitaxy (HVPE)

Indexed keywords

ELECTRON MOBILITY; EXCITONS; MAGNETIC RESONANCE; METALLORGANIC VAPOR PHASE EPITAXY; MOLECULAR BEAM EPITAXY; PHOTOLUMINESCENCE; SAPPHIRE; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR MATERIALS; SILICON CARBIDE;

EID: 0038421886     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2002.1021564     Document Type: Review
Times cited : (38)

References (84)
  • 1
    • 0033879056 scopus 로고    scopus 로고
    • Model development of GaN MOVPE growth chemistry for reactor design
    • Jan.
    • S. Jingxi, J. M. Redwing, and T. F. Kuech, "Model development of GaN MOVPE growth chemistry for reactor design," J. Electron. Mater., vol. 29, pp. 2-9, Jan. 2000.
    • (2000) J. Electron. Mater. , vol.29 , pp. 2-9
    • Jingxi, S.1    Redwing, J.M.2    Kuech, T.F.3
  • 2
    • 0002129467 scopus 로고    scopus 로고
    • Phase separation in InGaN grown by metal-organic chemical vapor deposition
    • Jan.
    • N. Elmasry, E. Piner, S. Liu, and S. Bedair, "Phase separation in InGaN grown by metal-organic chemical vapor deposition," Appl. Phys. Lett., vol. 72, pp. 40-42, Jan. 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 40-42
    • Elmasry, N.1    Piner, E.2    Liu, S.3    Bedair, S.4
  • 7
    • 0026244249 scopus 로고
    • GaN growth using GaN buffer layer
    • Oct.
    • S. Nakamura, "GaN growth using GaN buffer layer," Jpn. J. Appl. Phys., vol. 30, pp. L1705-L1707, Oct. 1991.
    • (1991) Jpn. J. Appl. Phys. , vol.30
    • Nakamura, S.1
  • 8
    • 0023040588 scopus 로고
    • Metal-organic vapor phase epitaxial growth of a high quality GaN film using an AIN buffer layer
    • Feb.
    • H. Amano, N. Sawaki, I. Akasaki, and Y. Toyoda, "Metal-organic vapor phase epitaxial growth of a high quality GaN film using an AIN buffer layer," Appl. Phys. Lett., vol. 48, pp. 353-355, Feb. 1986.
    • (1986) Appl. Phys. Lett. , vol.48 , pp. 353-355
    • Amano, H.1    Sawaki, N.2    Akasaki, I.3    Toyoda, Y.4
  • 9
    • 33751127103 scopus 로고
    • GaN thin films deposited via organometallic vapor phase epitaxy on 6H-SiC(0001) using high-temperature monocrystalline AlN buffer layers
    • May
    • W. Weeks, M. D. Bremser, K. Ailey, E. Carlson, W. Perry, and R. F. Davis, "GaN thin films deposited via organometallic vapor phase epitaxy on 6H-SiC(0001) using high-temperature monocrystalline AlN buffer layers," Appl. Phys. Lett., vol. 67. pp. 401-403, May 1995.
    • (1995) Appl. Phys. Lett. , vol.67 , pp. 401-403
    • Weeks, W.1    Bremser, M.D.2    Ailey, K.3    Carlson, E.4    Perry, W.5    Davis, R.F.6
  • 10
    • 0032094135 scopus 로고    scopus 로고
    • Theory of doping and defects in III-V nitrides
    • June
    • C. Van de Walle, C. Stampfl, and J. Neugebauer, "Theory of doping and defects in III-V nitrides," J. Cryst. Growth, vol. 189/190, pp. 505-510, June 1998.
    • (1998) J. Cryst. Growth , vol.189-190 , pp. 505-510
    • Van De Walle, C.1    Stampfl, C.2    Neugebauer, J.3
  • 12
    • 84883188181 scopus 로고
    • P-typc conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI)
    • Dec.
    • H. Amano, M. Kito, K. Hiramatsu, and I. Akasaki, "P-typc conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI),"Jpn. J. Appl. Phys., pt. 2, vol. 28, pp. L2112-L2114, Dec. 1989.
    • (1989) Jpn. J. Appl. Phys., Pt. 2 , vol.28
    • Amano, H.1    Kito, M.2    Hiramatsu, K.3    Akasaki, I.4
  • 13
    • 0026819254 scopus 로고
    • Thermal annealing effects on P-type Mg-doped GaN films
    • Feb.
    • S. Nakamura, "Thermal annealing effects on P-type Mg-doped GaN films." Jpn. J. Appl. Phys., vol. 31, pp. L139-L142, Feb. 1992.
    • (1992) Jpn. J. Appl. Phys. , vol.31
    • Nakamura, S.1
  • 14
    • 0001022760 scopus 로고    scopus 로고
    • Activation of acceptors in Mg-doped GaN grown by netalorganic chemical vapor deposition
    • Jan.
    • W. Gotz, N. M. Johnson, J. Walker, D. P. Bour, and R. A. Street, "Activation of acceptors in Mg-doped GaN grown by netalorganic chemical vapor deposition," Appl. Phys. Lett., vol. 68, pp. 667-669, Jan. 1996.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 667-669
    • Gotz, W.1    Johnson, N.M.2    Walker, J.3    Bour, D.P.4    Street, R.A.5
  • 15
    • 0001575626 scopus 로고    scopus 로고
    • The activation of Mg in GaN by annealing with minority-carrier injection
    • Mar.
    • M. Miyachi, T. Tanaka, Y. Kiumur, and H. Ota, "The activation of Mg in GaN by annealing with minority-carrier injection," Appl. Phys. Lett., vol. 72, pp. 1101-1103, Mar. 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 1101-1103
    • Miyachi, M.1    Tanaka, T.2    Kiumur, Y.3    Ota, H.4
  • 16
    • 0012549442 scopus 로고    scopus 로고
    • Acceptor and donor doping of AlGaN thin film alloys grown on 6H-SiC(0001) substrates via metal-organic vapor phase epitaxy
    • Apr.
    • M. D. Bremser, W. G. Perry, O. H. Nam, D. P. Griffis, R. Loesing, D. A. Ricks, and R. F. Davis, "Acceptor and donor doping of AlGaN thin film alloys grown on 6H-SiC(0001) substrates via metal-organic vapor phase epitaxy," J. Electron. Mater., vol. 27, pp. 229-232, Apr. 1998.
    • (1998) J. Electron. Mater. , vol.27 , pp. 229-232
    • Bremser, M.D.1    Perry, W.G.2    Nam, O.H.3    Griffis, D.P.4    Loesing, R.5    Ricks, D.A.6    Davis, R.F.7
  • 21
    • 0001466566 scopus 로고    scopus 로고
    • Lateral epitaxy of low defect density GaN layers via organometallic vapor phase epitaxy
    • Nov.
    • O. H. Nam, M. D. Bremser, T. S. Zheleva, and R. F. Davis, "Lateral epitaxy of low defect density GaN layers via organometallic vapor phase epitaxy," Appl. Phys. Lett., vol. 71, pp. 2638-2640, Nov. 1997.
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 2638-2640
    • Nam, O.H.1    Bremser, M.D.2    Zheleva, T.S.3    Davis, R.F.4
  • 22
    • 0042673587 scopus 로고    scopus 로고
    • InGaN/GaN/AlGaN-based laser diodes with an estimated lifetime of longer than 10000 hours
    • May
    • S. Nakamura, "InGaN/GaN/AlGaN-based laser diodes with an estimated lifetime of longer than 10000 hours," MRS Bullet., vol. 23, pp. 37-43, May 1998.
    • (1998) MRS Bullet. , vol.23 , pp. 37-43
    • Nakamura, S.1
  • 24
    • 0033115908 scopus 로고    scopus 로고
    • Pendeo-epitaxy - A new approach for lateral growth of gallium nitride films
    • Apr.
    • T. Zheleva, S. Smith, D. Thomson, and K. Linthicum, "Pendeo-epitaxy - A new approach for lateral growth of gallium nitride films," J. Electron. Mater., vol. 28, pp. L5-L8, Apr. 1999.
    • (1999) J. Electron. Mater. , vol.28
    • Zheleva, T.1    Smith, S.2    Thomson, D.3    Linthicum, K.4
  • 27
    • 0000552320 scopus 로고    scopus 로고
    • Strain relaxation and strong impurity incorporation in epitaxial laterally overgrown GaN: Direct imaging of different growth domains by cathodoluminescence microscopy and micro-raman spectroscopy
    • Jan.
    • F. Bertram, T. Riemann, J. Christen, A. Kaschner, A. Hoffmann, C. Thomsen, K. Hiramatsu, T. Shibata, and N. Sawaki, "Strain relaxation and strong impurity incorporation in epitaxial laterally overgrown GaN: Direct imaging of different growth domains by cathodoluminescence microscopy and micro-raman spectroscopy," Appl. Phys. Lett., vol. 74, pp. 359-361, Jan. 1999.
    • (1999) Appl. Phys. Lett. , vol.74 , pp. 359-361
    • Bertram, F.1    Riemann, T.2    Christen, J.3    Kaschner, A.4    Hoffmann, A.5    Thomsen, C.6    Hiramatsu, K.7    Shibata, T.8    Sawaki, N.9
  • 29
    • 0033221285 scopus 로고    scopus 로고
    • Analysis of the defect structure of epitaxial GaN
    • Nov.
    • H. Heinke, V. Kirchner, S. Einfeldt, and D. Hommel, "Analysis of the defect structure of epitaxial GaN," Phys. Stat. Sol. (a), vol. 176, pp. 391-395, Nov. 1999.
    • (1999) Phys. Stat. Sol. (a) , vol.176 , pp. 391-395
    • Heinke, H.1    Kirchner, V.2    Einfeldt, S.3    Hommel, D.4
  • 32
    • 0001528599 scopus 로고    scopus 로고
    • Homoepitaxial growth of GaN under Ga-stable and N-stable conditions by plasma-assisted molecular beam epitaxy
    • Dec.
    • E. J. Tarsa, B. Heying, X. H. Wu, P. Fini, S. P. DenBaars, and J. S. Speck, "Homoepitaxial growth of GaN under Ga-stable and N-stable conditions by plasma-assisted molecular beam epitaxy," J. Appl. Phys., vol. 82, no. 11, pp. 5472-5479, Dec. 1997.
    • (1997) J. Appl. Phys. , vol.82 , Issue.11 , pp. 5472-5479
    • Tarsa, E.J.1    Heying, B.2    Wu, X.H.3    Fini, P.4    DenBaars, S.P.5    Speck, J.S.6
  • 34
    • 0022668787 scopus 로고
    • On the practical applications of MBE surface phase diagrams
    • Feb.
    • S. M. Newstead, R. A. A. Kubiak, and E.H.C. Parker, "On the practical applications of MBE surface phase diagrams," J. Cryst. Growth, vol. 81, no. 1-4, pp. 49-54, Feb. 1987.
    • (1987) J. Cryst. Growth , vol.81 , Issue.1-4 , pp. 49-54
    • Newstead, S.M.1    Kubiak, R.A.A.2    Parker, E.H.C.3
  • 35
    • 0027578007 scopus 로고
    • Instability of III-V compound surfaces due to liquid phase formation
    • Apr.
    • S. Y. Karpov, Y. V. Kovalchuk, V. E. Myachin, and Y. V. Pogorelskii, "Instability of III-V compound surfaces due to liquid phase formation," J. Cryst. Growth, vol. 129, no. 3-4, pp. 563-570, Apr. 1993.
    • (1993) J. Cryst. Growth , vol.129 , Issue.3-4 , pp. 563-570
    • Karpov, S.Y.1    Kovalchuk, Y.V.2    Myachin, V.E.3    Pogorelskii, Y.V.4
  • 39
  • 40
    • 0000424023 scopus 로고    scopus 로고
    • Monitoring surface stoichiometry with the (2 × 2) reconstruction during grwth of hexagonal phase GaN by molecular beam epitaxy
    • Oct.
    • P. Hacke, G. Feuillet, H. Okumura, and S. Yoshida, "Monitoring surface stoichiometry with the (2 × 2) reconstruction during grwth of hexagonal phase GaN by molecular beam epitaxy," Appl. Phys. Lett., vol. 69, no. 17, pp. 2507-2509, Oct. 1996.
    • (1996) Appl. Phys. Lett. , vol.69 , Issue.17 , pp. 2507-2509
    • Hacke, P.1    Feuillet, G.2    Okumura, H.3    Yoshida, S.4
  • 42
    • 0000264104 scopus 로고    scopus 로고
    • Optimization of the surface morphologies and electron mobilities in GaN grown by plasma-assisted molecular beam epitaxy
    • Oct.
    • B. Heying, I. Smorchkova, C. Poblenz, C. Elsass, P. Fini, S. Den Baars, U. Mishra, and J. S. Speck, "Optimization of the surface morphologies and electron mobilities in GaN grown by plasma-assisted molecular beam epitaxy," Appl. Phys. Lett., vol. 77, no. 18, pp. 2885-2887, Oct. 2000.
    • (2000) Appl. Phys. Lett. , vol.77 , Issue.18 , pp. 2885-2887
    • Heying, B.1    Smorchkova, I.2    Poblenz, C.3    Elsass, C.4    Fini, P.5    Den Baars, S.6    Mishra, U.7    Speck, J.S.8
  • 43
    • 84888785051 scopus 로고    scopus 로고
    • B. Heying, T. Myers, and J. S. Speck, unpublished data
    • B. Heying, T. Myers, and J. S. Speck, unpublished data.
  • 45
    • 84888803719 scopus 로고    scopus 로고
    • E. Haus, Y. Smorchkova, B. Heying, U. K. Mishra, S. P. DenBaars, and J. S. Speck, unpublished data
    • E. Haus, Y. Smorchkova, B. Heying, U. K. Mishra, S. P. DenBaars, and J. S. Speck, unpublished data.
  • 46
    • 0000804158 scopus 로고    scopus 로고
    • Polarization-induced charge and electron mobility in AlGaN/GaN heterostructures grown by plasma-assisted molecular-beam epitaxy
    • Oct.
    • I. P. Smorchkova, C. R. Elsass, J. P. Ibbetson, R. Vetury, B. Heying, P. Fini, E. Haus, S. P. DenBaars, J. S. Speck, and U. K. Mishra, "Polarization-induced charge and electron mobility in AlGaN/GaN heterostructures grown by plasma-assisted molecular-beam epitaxy," J. Appl. Phys., vol. 86, no. 8, pp. 4520-4526, Oct. 1999.
    • (1999) J. Appl. Phys. , vol.86 , Issue.8 , pp. 4520-4526
    • Smorchkova, I.P.1    Elsass, C.R.2    Ibbetson, J.P.3    Vetury, R.4    Heying, B.5    Fini, P.6    Haus, E.7    Denbaars, S.P.8    Speck, J.S.9    Mishra, U.K.10
  • 48
    • 0035546553 scopus 로고    scopus 로고
    • Influence of Ga flux on the growth and electron transport properties of AlGaN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy
    • Dec.
    • C. R. Elsass, C. Poblenz, B. Heying, P. Fini, P. M. Petroff, S. P. DenBaars, U. K. Mishra, and J. S. Speck, "Influence of Ga flux on the growth and electron transport properties of AlGaN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy," J. Cryst. Growth, vol. 233, no. 4, pp. 709-716. Dec. 2001.
    • (2001) J. Cryst. Growth , vol.233 , Issue.4 , pp. 709-716
    • Elsass, C.R.1    Poblenz, C.2    Heying, B.3    Fini, P.4    Petroff, P.M.5    Denbaars, S.P.6    Mishra, U.K.7    Speck, J.S.8
  • 49
    • 0002606876 scopus 로고
    • Light scattering in solids
    • Springer-Verlag, Germany
    • M. Cardona, "Light scattering in solids," in Topics in Applied. Physics Springer-Verlag, Germany, 1983, vol. 8.
    • (1983) Topics in Applied. Physics , vol.8
    • Cardona, M.1
  • 50
    • 5944246702 scopus 로고
    • Absorption, reflectance, and luminescence of GaN epitaxial layers
    • Aug.
    • R. Dingle, D. D. Sell, S. E. Stokowski, and M. Ilegems, "Absorption, reflectance, and luminescence of GaN epitaxial layers," Phys. Rev. B, vol. 4, pp. 1211-1218, Aug. 1971.
    • (1971) Phys. Rev. B , vol.4 , pp. 1211-1218
    • Dingle, R.1    Sell, D.D.2    Stokowski, S.E.3    Ilegems, M.4
  • 51
    • 0344548628 scopus 로고
    • Improvements on the electrical and luminescence properties of reactive molecular beam epitaxially grown films by using AlN-coated sapphire substrates
    • Mar.
    • S. Yoshida, S. Misawa, and S. Gonda, "Improvements on the electrical and luminescence properties of reactive molecular beam epitaxially grown films by using AlN-coated sapphire substrates," Appl. Phys. Lett., vol. 42, pp. 427-130, Mar. 1983.
    • (1983) Appl. Phys. Lett. , vol.42 , pp. 427-1130
    • Yoshida, S.1    Misawa, S.2    Gonda, S.3
  • 52
    • 0023040588 scopus 로고
    • Metal-organic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer
    • Feb.
    • H. Amano, N. Sawaki, I. Akasaki, and T. Toyoda, "Metal-organic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer," Appl. Phys. Lett., vol. 48, pp. 353-355, Feb. 1986.
    • (1986) Appl. Phys. Lett. , vol.48 , pp. 353-355
    • Amano, H.1    Sawaki, N.2    Akasaki, I.3    Toyoda, T.4
  • 54
    • 0029766288 scopus 로고    scopus 로고
    • Excitonic recombination processes in doped and undoped wurtzite GaN films deposited on sapphire substrates
    • J. A. Freitas, Jr., K. Doverspike, and A. E. Wickenden, "Excitonic recombination processes in doped and undoped wurtzite GaN films deposited on sapphire substrates," Proc. Mater. Res. Soc. Symp., vol. 395, pp. 485-190, 1996.
    • (1996) Proc. Mater. Res. Soc. Symp. , vol.395 , pp. 485-1190
    • Freitas Jr., J.A.1    Doverspike, K.2    Wickenden, A.E.3
  • 55
    • 36448999916 scopus 로고
    • Temperature dependence of interband transitions in GaN grown by metal-organic chemical vapor deposition
    • Feb.
    • W. Shan, T. J. Schmidt, X. H. Yang, S. J. Huang, J. J. Song, and B. Goldenberg, "Temperature dependence of interband transitions in GaN grown by metal-organic chemical vapor deposition," Appl. Phys. Lett., vol. 66, pp. 985-987, Feb. 1995.
    • (1995) Appl. Phys. Lett. , vol.66 , pp. 985-987
    • Shan, W.1    Schmidt, T.J.2    Yang, X.H.3    Huang, S.J.4    Song, J.J.5    Goldenberg, B.6
  • 57
    • 0000782597 scopus 로고    scopus 로고
    • Behavior of 2.8-and 3.2-eV photoluminescence bands in Mg-doped GaN at different temperatures and excitation densities
    • May
    • M. A. Reshchikov, G.-C. Yi, and B. W. Wessels, "Behavior of 2.8-and 3.2-eV photoluminescence bands in Mg-doped GaN at different temperatures and excitation densities," Phys. Rev. B, vol. 59, pp. 13 176-13183, May 1999.
    • (1999) Phys. Rev. B , vol.59 , pp. 13176-13183
    • Reshchikov, M.A.1    Yi, G.-C.2    Wessels, B.W.3
  • 60
    • 0000235405 scopus 로고    scopus 로고
    • Optical characterization of lateral epitaxial overgrown GaN layers
    • June
    • J. A. Freitas, Jr., O.-K. Nam, R. F. Davis, G. V. Saparin, and S. K. Obyden, "Optical characterization of lateral epitaxial overgrown GaN layers," Appl. Phys. Lett., vol. 72, pp. 2990-2293, June 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 2990-12293
    • Freitas Jr., J.A.1    Nam, O.-K.2    Davis, R.F.3    Saparin, G.V.4    Obyden, S.K.5
  • 62
    • 0035862506 scopus 로고    scopus 로고
    • Properties of freestanding GaN substrates grown by hydride vapor phase epitaxy
    • Jan.
    • K. Lee and K. Auh, "Properties of freestanding GaN substrates grown by hydride vapor phase epitaxy," Jpn. J. Appl. Phys., vol. 40, p. L13, Jan. 2001.
    • (2001) Jpn. J. Appl. Phys. , vol.40
    • Lee, K.1    Auh, K.2
  • 66
    • 9644263296 scopus 로고    scopus 로고
    • Magnetic resonance of epitaxial layers detected by photoluminescencein
    • M. Stavola, Ed. New York: Academic
    • T. A. Kennedy and E. R. Glaser, "Magnetic resonance of epitaxial layers detected by photoluminescencein," in Identification of Defects in Semiconductors, M. Stavola, Ed. New York: Academic, 1998, vol. 51 A, Semiconductors and Semimetals, pp. 93-136.
    • (1998) Identification of Defects in Semiconductors , vol.51 , pp. 93-136
    • Kennedy, T.A.1    Glaser, E.R.2
  • 67
    • 33847151435 scopus 로고
    • Solid-state magic-angle sample-spinning nuclear magnetic resonance spectroscopic study of group III-V semiconductors
    • Nov.
    • O. Han, H. K. C. Timken, and E. Oldfield, "Solid-state magic-angle sample-spinning nuclear magnetic resonance spectroscopic study of group III-V semiconductors," J. Chem. Phys., vol. 89, pp. 6046-6052, Nov. 1988.
    • (1988) J. Chem. Phys. , vol.89 , pp. 6046-6052
    • Han, O.1    Timken, H.K.C.2    Oldfield, E.3
  • 70
    • 77956786019 scopus 로고    scopus 로고
    • Magnetic resonance investigations of group-III nitrides
    • R. K. Willardson and E. R. Weber, Eds. New York: Academic
    • B. K. Meyer, "Magnetic resonance investigations of group-III nitrides," in Semiconductors and Semimetals, R. K. Willardson and E. R. Weber, Eds. New York: Academic, 1999, vol. 57, pp. 371-406.
    • (1999) Semiconductors and Semimetals , vol.57 , pp. 371-406
    • Meyer, B.K.1
  • 72
    • 0037198541 scopus 로고    scopus 로고
    • Characterization of nitrides by electron paramagnetic resonance (EPR) and optically detected magnetic resonance (ODMR)
    • May
    • E. R. Glaser et al., "Characterization of nitrides by electron paramagnetic resonance (EPR) and optically detected magnetic resonance (ODMR)," Mater. Sci. Eng. B, vol. 93, no. 1-3, pp. 39-48, May 2002.
    • (2002) Mater. Sci. Eng. B , vol.93 , Issue.1-3 , pp. 39-48
    • Glaser, E.R.1
  • 73
    • 0000054006 scopus 로고
    • Conduction electron spin resonance in zinc-blende GaN thin films
    • Nov.
    • M. Fanciulli, T. Lei, and T. D. Moustakas, "Conduction electron spin resonance in zinc-blende GaN thin films," Phys. Rev. B, vol. 48, pp. 15 144-15 147, Nov. 1993.
    • (1993) Phys. Rev. B , vol.48
    • Fanciulli, M.1    Lei, T.2    Moustakas, T.D.3
  • 74
    • 0004011008 scopus 로고    scopus 로고
    • Magnetic resonance studies of dopants and defects in GaN-based materials and devices
    • C. A. J. Ammerlaan and B. Pajot, Eds. Singapore: World Scientific
    • W. E. Carlos, "Magnetic resonance studies of dopants and defects in GaN-based materials and devices," in Proceedings of the 7th International Conference on Shallow Level Centers in Semiconductors, C. A. J. Ammerlaan and B. Pajot, Eds. Singapore: World Scientific, 1997, p. 13.
    • (1997) Proceedings of the 7th International Conference on Shallow Level Centers in Semiconductors , pp. 13
    • Carlos, W.E.1
  • 77
    • 0032636140 scopus 로고    scopus 로고
    • Magnetic resonance studies of InGaN- Based quantum well diodes
    • Mar.
    • W. E. Carlos, E. R. Glaser, T. A. Kennedy, and S. Nakamura, "Magnetic resonance studies of InGaN- based quantum well diodes," J. Electron. Mater., vol. 28, pp. 252-256, Mar. 1999.
    • (1999) J. Electron. Mater. , vol.28 , pp. 252-256
    • Carlos, W.E.1    Glaser, E.R.2    Kennedy, T.A.3    Nakamura, S.4
  • 78
    • 0034714663 scopus 로고    scopus 로고
    • Detection of interstitial Ga in GaN
    • Sept.
    • K. H. Chow, G. D. Watkins, A. Usui, and M. Mizuta, "Detection of interstitial Ga in GaN," Phys. Rev. Lett., vol. 85, pp. 2761-2764, Sept. 2000.
    • (2000) Phys. Rev. Lett. , vol.85 , pp. 2761-2764
    • Chow, K.H.1    Watkins, G.D.2    Usui, A.3    Mizuta, M.4
  • 79
    • 36149015145 scopus 로고
    • Electron spin resonance experiments on donors in silicon. I. Electronic structure of donors by the electron nuclear double resonance technique
    • June
    • G. Feher, "Electron spin resonance experiments on donors in silicon. I. Electronic structure of donors by the electron nuclear double resonance technique," Phys. Rev., vol. 114, pp. 1219-1244, June 1959.
    • (1959) Phys. Rev. , vol.114 , pp. 1219-1244
    • Feher, G.1
  • 80
    • 0033322887 scopus 로고    scopus 로고
    • Optically-detected magnetic resonance of shallow donor-shallow acceptor and deep (2.8-3.2 eV) recombination from Mg-doped GaN
    • Dec.
    • E. R. Glaser, T. A. Kennedy, J. A. Freitas, Jr., B. V. Shanabrook, A. E. Wickenden, D. D. Koleske, R. L. Henry, and H. Obloh, "Optically-detected magnetic resonance of shallow donor-shallow acceptor and deep (2.8-3.2 eV) recombination from Mg-doped GaN," Physica B, vol. 273/274, pp. 58-62, Dec. 1999.
    • (1999) Physica B , vol.273-274 , pp. 58-62
    • Glaser, E.R.1    Kennedy, T.A.2    Freitas Jr., J.A.3    Shanabrook, B.V.4    Wickenden, A.E.5    Koleske, D.D.6    Henry, R.L.7    Obloh, H.8
  • 82
    • 85010812746 scopus 로고    scopus 로고
    • Gallium vacancies and the yellow luminescence in GaN
    • July
    • J. Neugebauer and C. Van de Walle, "Gallium vacancies and the yellow luminescence in GaN," Appl. Phys. Lett., vol. 69, pp. 503-505, July 1996.
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 503-505
    • Neugebauer, J.1    Van De Walle, C.2
  • 84
    • 84888771943 scopus 로고    scopus 로고
    • private communication
    • G. D. Watkins, private communication.
    • Watkins, G.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.