Voltage and pull-in time in current drive of electrostatic actuators

Journal of Microelectromechanical Systems

Volumn 11, Issue 3, 2002, Pages 196-205

  Pons Nin, Joan ^a,b   Rodríguez, Angel ^a,b   Castaher, Luis M ^a,b  

^a IEEE   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

Current drive; Electrostatic actuators; MEMS capacitors; Pull in time; Stability; Voltage drive

Indexed keywords

VOLTAGE TRANSIENTS;

CAPACITANCE; CAPACITORS; DAMPING; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES;

ELECTROSTATIC ACTUATORS;

EID: 0036601060     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.1007398     Document Type: Article

References (22)

1. A surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHz
2. Micromachined electromechanically tunable capacitors and their applications to RF IC's
3. A micromachined variable capacitor for monolitic low noise VCO's
4. Micromachined widely tunable vertical cavity lasers
5. Mechanical considerations in the design of a micromechanical tunable In-P based WDM filter
6. Broadly-tunable resonant cavity light emitting diode
7. Extending the travel range of analog tuned electrostatic actuators
8. Increasing the dynamic range of a micromechanical moving-plate capacitor
9. Stabilization of electrostatically actuated mechanical devices
10. Electrostatic micromechanical actuator with extended range of travel
11. Dynamics and control of parallel-plate actuators beyond the electrostatic unstability
12. Speed-energy optimization of electrostatic actuators based on pull-in
13. Analysis of the extended operation range of electrostatic actuators by current pulse drive
14. Current drive methods to extend the range of travel of electrostatic microactuators beyond pull-in point
15. New current drive method to extend the stable operation range of electrostatic actuators: Experimental verification
16. Pull-in time dynamics as a measure of absolute pressure
17. Periodic and chaotic behavior of the autonomous impact resonator
18. Measurement of speed-power product in electrostatic actuators
19. Pull-in time-speed product of electrostatic actuators: Comparison of experiments with simulation
20. AC and DC voltage standards based on silicon micromechanics
21. On the effect of residual charges on the pull-in parameters of electrostatic actuators