Contact materials for microrelays

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 190-194

  Schimkat, Joachim ^a  

^a Engineering Office Schimkat   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RELAYS; GOLD; GOLD ALLOYS; PRECISION ENGINEERING; RHODIUM; SILICON;

MICRORELAY ACTUATORS; SCHALTREINIGUNG CLEANING METHOD;

ACTUATORS;

EID: 0031678165     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)