Effect of support compliance and residual stress on the shape of doubly supported surface-micromachined beams

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 361-369

  Kobrinsky, Mauro J ^a   Deutsch, Erik R ^b   Senturia, Stephen D ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEAMS AND GIRDERS; BENDING (DEFORMATION); BUCKLING; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); ELASTIC MODULI; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; RESIDUAL STRESSES; SILICON;

SURFACE MICROMACHINED BEAMS;

MICROMACHINING;

EID: 0034270748     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870062     Document Type: Article

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