Diamond and amorphous carbon MEMS

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 309-311

  Sullivan, J P ^a   Friedmann, T A ^a   Hjort, K ^a  

^a NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001373871     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.68     Document Type: Article

References (25)

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