Micromachined widely tunable vertical cavity laser diodes

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 48-55

  Sugihwo, Fredy ^a,b,d,e   Larson, Michael C ^{a,b,c,f,g,h,i}   Harris Jr , James S ^a,b,j,k,l  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c HITACHI LTD   (Japan)

^d UNIVERSITY OF MICHIGAN   (United States)

^e Stanford University ^*  (United States)

^f HARVEY MUDD COLLEGE   (United States)

^g LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^h OPTICAL SOCIETY OF AMERICA   (United States)

ⁱ Intl Soc for Optical Engineering

^j Stanford University   (United States)

^k ROCKWELL SCIENCE CENTER   (United States)

^l AMERICAN PHYSICAL SOCIETY   (United States)

more..

Author keywords

Laser tuning; Microelectromechanical devices; Optical interconnections; Semiconductor lasers; Tunable circuits devices; Wavelength division multiplexing

Indexed keywords

FREQUENCY DIVISION MULTIPLEXING; LASER TUNING; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL INTERCONNECTS; REFRACTIVE INDEX;

TUNABLE CIRCUITS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL'S);

SEMICONDUCTOR LASERS;

EID: 0032028619     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661383     Document Type: Article

References (24)

1. K. Iga, F. Koyama, and S. Kinoshita, "Surface emitting semiconductor lasers," IEEE J. Quantum Electron., vol. 24, pp. 1845-1855, Sept. 1988.
2. J. L. Jewell, J. P. Harbison, A. Scherer, Y. H. Lee, and L. T. Florez, "Vertical-cavity surface-emitting lasers: Design, growth, fabrication, characterization," IEEE J. Quantum Electron., vol. 27, pp. 1332-1346, June 1991.
3. C. J. Chang-Hasnain, J. P. Harbison, C. E. Zah, M. W. Maeda, L. T. Florez, N. G. Stoffel, and T. P. Lee, "Multiple wavelength tunable surface-emitting laser arrays," IEEE J. Quantum Electron., vol. 27, pp. 1368-1376, June 1991.
4. P. R. Berger, N. K. Dutta, K. D. Choquette, G. Hasnain, and N. Chand, "Monolithically Peltier-cooled vertical-cavity surface-emitting lasers," Appl. Phys. Lett., vol. 59, pp. 117-119, July 1991.
5. C. J. Chang-Hasnain, J. P. Harbison, C. E. Zah, L. T. Florez, and N. C. Andreadakis, "Continuous wavelength tuning of two-electrode vertical cavity surface emitting lasers," Electron. Lett., vol. 27, pp. 1002-1003, May 1991.
6. L. Fan, M. C. Wu, H. C. Lee, and P. Grodzinski, "10.1 nm range continuous wavelength tunable vertical-cavity surface-emitting lasers," Electron. Lett., vol. 30, pp. 1409-1410, Aug. 1994.
7. B. Pezeshki and J. S. Harris, Jr., U.S. Patent 5291 502, Sept. 4, 1992.
8. M. C. Larson, B. Pezeshki, and J. S. Harris, Jr., "Vertical coupled-cavity microinterferometer on GaAs with deformable-membrane top mirror," IEEE Photon. Technol. Lett., vol. 7, pp. 382-384, Apr. 1995.
9. M. C. Larson and J. S. Harris, Jr., 26quot;Broadly-tunable resonantcavity light-emitting diode," IEEE Photon. Technol. Lett., vol. 7, pp. 1267-1269, Nov. 1995.
10. M. C. Larson, A. R. Massengale, and J. S. Harris, Jr., "Continuously tunable micromachined vertical cavity surface emitting laser with 18 nm wavelength range," Electron. Lett., vol. 32, pp. 330-332, Feb. 1996.
11. F. Sugihwo, M. C. Larson, and J. S. Harris, Jr., "Low threshold continuously tunable vertical-cavity surface-emitting lasers with 19.1 nm wavelength range," Appl. Phys. Lett., vol. 70, pp. 547-549, Feb. 1997.
12. E. Vail, M. S. Wu, G. S. Li, L. Eng, and C. J. Chang-Hasnain, "GaAs micromachined widely tunable Fabry-Perot filters," Electron. Lett., vol. 31, pp. 228-229, Feb. 1995.
13. M. S. Wu, E. C. Vail, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, "Tunable micromachined vertical cavity surface emitting laser," Electron. Lett., vol. 31, pp. 1671-1672, Sept. 1995.
14. _, "Widely and continuously tunable micromachined resonant cavity detector with wavelength tracking," IEEE Photon. Technol. Lett., vol. 8, pp. 98-100, Jan. 1996.
15. G. L. Christenson, A. T. T. D. Tran, Z. H. Zhu, Y. H. Lo, M. Hong, J. P. Mannaerts, and R. Bhat, "Long-wavelength resonant vertical-cavity LED/photodetector with a 75-nm tuning range," IEEE Photon. Technol. Lett., vol. 9, pp. 725-727, June 1997.
16. 1-xAs-AlAs-GaAs quantum well heterostructures and superlattices," Appl. Phys. Lett., vol. 57, pp. 2844-2846, Dec. 1990.
17. T. Carver, personal communication.
18. R. Legtenberg, J. Elders, and M. Elwenspoek, "Stiction of surface microstructures after rinsing and drying: Model and investigation of adhesion mechanisms," in Proc. Int. Conf. Solid-State Sensors and Actuators, Yokohama, Japan, 1993, pp. 198-201.
19. D. L. Huffaker, D. G. Deppe, K. Kumar, and T. J. Rogers, "Native-oxide defined ring contact for low threshold vertical-cavity lasers," Appl Phys. Lett., vol. 65, pp. 97-99, July 1994.
20. K. D. Choquette, W. W. Chow, M. H. Crawford, K. M. Geib, and R. P. Schneider, "Threshold investigation of oxide-confined vertical-cavity laser diodes," Appl. Phys. Lett., vol. 68, pp. 3689-3691, June 1996.
21. 0.89As quantum wells," Electron. Lett., vol. 32, pp. 1287-1288, July 1996.
22. E. R. Hegblom, D. I. Babic, B. J. Thibeault, and L. A. Coldren, "Estimation of scattering losses in dielectrically apertured vertical cavity lasers," Appl. Phys. Lett., vol. 68, pp. 1757-1759, Mar. 1996.
23. B. J. Thibeault, E. R. Hegblom, P. D. Floyd, R. Naone, Y. Akulova, and L. A. Coldren, "Reduced optical scattering loss in vertical-cavity lasers using a thin (300 A) oxide aperture," IEEE Photon. Technol. Lett., vol. 8, pp. 593-595, May 1996.
24. M. C. Larson, F. Sugihwo, A. R. Massengale, and J. S. Harris, Jr., "Micromachined tunable vertical-cavity surface-emitting lasers," in Proc. Int. Electron Devices Meet., San Francisco, CA, Dec. 1996, p. 405.