Electrostatic micro torsion mirrors for an optical switch matrix

Journal of Microelectromechanical Systems

Volumn 5, Issue 4, 1996, Pages 231-237

  Toshiyoshi, Hiroshi ^b,c,d   Fujita, Hiroyuki ^a,b,c,e,f  

^a IEEE

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

^d JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^f Japan Soc of Cryogenic Engineering   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MICROMACHINING; MIRRORS; SILICON; TORSIONAL STRESS;

ELECTROSTATIC MICROTORSION MIRRORS; OPTICAL SWITCH MATRIX;

OPTICAL SWITCHES;

EID: 0030407468     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.546402     Document Type: Article

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