|
Volumn 38, Issue 2 I, 2002, Pages 1053-1056
|
Topology optimization of electrostatic actuator using design sensitivity
|
Author keywords
Density method; Design sensitivity; Electrostatic actuator; Topology optimization
|
Indexed keywords
DIELECTRIC MATERIALS;
MAXWELL EQUATIONS;
MICROELECTROMECHANICAL DEVICES;
OPTIMIZATION;
PERMITTIVITY;
ROTORS (WINDINGS);
TOPOLOGY;
TORQUE CONTROL;
VECTORS;
MICROELECTROMECHANICAL SYSTEM (MEMS);
ELECTROSTATIC ACTUATORS;
|
EID: 0036493345
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/20.996270 Document Type: Article |
Times cited : (50)
|
References (6)
|