Surface micromachined miniature switch for telecommunications applications with signal frequencies from DC up to 4 GHZ

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 384-387

  Yao, Jason J ^a   Chang, M Frank ^a  

^a ROCKWELL SCIENCE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC CONTACTS; ELECTROSTATICS; GOLD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVE INTEGRATED CIRCUITS; MILLIMETER WAVE DEVICES; PLATINUM; SEMICONDUCTING GALLIUM ARSENIDE; SILICA; TELECOMMUNICATION EQUIPMENT;

ELECTROSTATIC ACTUATION; MICROBEAM; MINIATURE SWITCHES; RF SWITCH; SURFACE MICROMACHINING;

ELECTRIC RELAYS;

EID: 0029543057     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)