Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators

Electronics Letters

Volumn 34, Issue 18, 1998, Pages 1787-1788

  Rosa, M A ^a   Dimitrijev, S ^a   Harrison, H B ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; ELECTROSTATICS;

COMB FINGER DESIGN; ELECTROSTATIC COMB-DRIVE ACTUATORS;

ACTUATORS;

EID: 0032480148     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19981230     Document Type: Article

References (8)

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3. YAO, J.J., ARNEY, S.C., and MACDONALD, N.C.: 'Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices'. Proc. IEEE MEMS, 1992, pp. 14-22
4. YUN, W., HOWE, R.T., and GRAY, P.R: 'Surface micromachined digitally force balanced accelerometer with integrated CMOS detection circuitry'. Tech. Dig., IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, June 1992, pp. 126-131
5. SNIEGOWSKI, J.J., and GARCIA, E.J.: 'Surface-micromachined gear trains driven by an on-chip electrostatic micro-engine', IEEE Electron. Device Lett., 1996, pp. 366-368
6. YE, W., MUKHERJEE, S., and MACDONALD, N.C.: 'Optimal shape design of an electrostatic comb drive in microelectromechanical systems', J. Microelectromech. Syst., 1998, 7, (1), pp. 16-26
7. ROSA, M.A., DIMITRIJEV, S., and HARRISON, H.B.: 'Improved operation of microelectromechanical comb-drive actuators through the use of a new angled comb finger design'. SPIE Conf: Smart Materials, structures and MEMS Oral Presentation, 1997, Vol. 3242, pp. 212-218
8. ROSA, M.A., DIMITRIJEV, S., and HARRISON, H.B.: 'Avoidance of stiction in the release of highly boron doped micro-actuators fabricated using BESOI substrates', Microelectron. Reliability, (submitted)