SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 394, Issue 1-2, 2001, Pages 1-14

Review of the filtered vacuum arc process and materials deposition

(2) Martin, P J a Bendavid, A a

a CSIRO (Australia)

Author keywords

Filtered cathodic vacuum arc; Tetrahedral amorphous carbon; Titanium nitride

Indexed keywords

ADHESION; AMORPHOUS MATERIALS; FILM GROWTH; SYNTHESIS (CHEMICAL); TITANIUM NITRIDE;

FILTERED VACUUM ARC PROCESS;

ELECTRODEPOSITION;

EID: 0035881436 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01169-5 Document Type: Review

Times cited : (253)

References (127)

1
- 0002006920
- (1877) Am. J. Sci. Arts , vol.13 , pp. 49
- Wright, A.W.¹

2
- 0004298080
- US Patent, 484,582 (1892)
- Edison, T.A.¹

3
- 0034472631
- Vacuum arc deposition: Early history and recent developments
- Xian, China, September
- (2000) Proc. ISDEIV
- Boxman, R.L.¹

4
- 0004029498
- Noyes, New York
- (1996) Handbook of Vacuum Arc Science and Technology
- Boxman, R.L.¹ Martin, P.J.² Sanders, D.³

5
- 0001621931
- (2000) J. Appl. Phys. , vol.88 , pp. 5618-5622
- Yushkov, G.Y.¹ Anders, A.² Oks, E.M.³ Brown, I.G.⁴

6
- 0033898323
- (2000) Thin Solid Films , vol.359 , pp. 288-292
- Ma, Z.Q.¹ Kido, Y.²

7
- 0033512093
- (1999) Surf. Coat. Technol. , vol.120 , pp. 319-330
- Anders, A.¹

8
- 4043127038
- (1996) Surf. Coat. Technol. , vol.86 , pp. 243-253
- Boxman, R.L.¹ Zhitomirsky, V.² Alterkop, B.³ Gidalevich, E.⁴ Belis, I.⁵ Keidar, M.⁶ Goldsmith, S.⁷

9
- 0031551613
- (1997) Surf. Coat. Technol. , vol.96 , pp. 22-23
- Karpov, D.A.¹

10
- 0033503273
- (1999) Surf. Coat. Technol. , vol.120 , pp. 226-232
- Schuelke, T.¹ Witke, T.² Scheibe, H.-J.³ Siemroth, P.⁴ Schultrich, B.⁵ Zimmer, O.⁶ Vetter, J.⁷

11
- 0031643548
- (1998) Ann. Rev. Mater. Sci. , vol.28 , pp. 243-269
- Brown, I.G.¹

12
- 0034492630
- Review of cathodic arc deposition technology at the start of the new millennium
- ICMCTF San Diego April 2000
- (2000) Surf. Coat. Technol.
- Sanders, A.M.¹ Anders, A.²

13
- 0034049252
- (2000) Surf. Coat. Technol. , vol.125 , pp. 161-166
- Miernik, K.¹ Walkowicz, J.²

14
- 17344385061
- (1997) Surf. Coat. Technol. , vol.94 , pp. 201-206
- Yoon, J.S.¹ Han, J.G.²

15
- 0032679019
- (1999) Jpn. J. Appl. Phys. , vol.38
- Chun, S.Y.¹ Chayahara, A.² Kinomura, A.³ Tsubouchi, N.⁴ Heck, C.⁵ Horino, Y.⁶ Fukui, H.⁷

16
- 0004215904
- US Patent 4,511,593 (1985)
- Brandolf, H.¹

17
- 85007650018
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 810-812
- Ryabchikov, A.I.¹ Stepanov, I.B.²

18
- 84961768561
- (1998) Rev. Sci. Instrum. , vol.69 , pp. 893-895
- Ryabchikov, A.I.¹ Stepanov, I.B.² Dektjarev, S.V.³ Sergeev, O.V.⁴

19
- 0033311354
- (1999) IEEE Trans. Plasma Sci. , vol.27 , pp. 1197-1202
- Bilek, M.M.M.¹ Anders, A.² Brown, I.G.³

20
- 0017992915
- (1978) Sov. J. Plasma Phys. , vol.4 , pp. 425-430
- Aksenov, I.I.¹ Belous, V.A.² Padalka, V.G.³ Koroshikh, V.M.⁴

21
- 0004298084
- U.S. patent, 5,435,900 (1995)
- Gorokhovsky, V.I.¹

22
- 0004359191
- U.S. Patent, 5,480527 (1996)
- Welty, R.P.¹

23
- 0031206910
- (1997) IEEE Trans. Plasma Sci. , vol.25 , pp. 670-675
- Anders, S.¹ Anders, A.² Dickenson, M.R.³ MacGill, R.⁴ Brown, I.G.⁵

24
- 0034310602
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 96-100
- Anders, A.¹ MacGill, R.A.²

25
- 0012664816
- (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.4 , pp. 2351-2359
- Martin, P.J.¹ Bendavid, A.² Takikawa, H.³

26
- 0001131449
- (1999) Rev. Sci. Instrum. , vol.70 , Issue.8 , pp. 3329-3331
- Zhang, T.¹ Tay, B.Y.² Chen, Q.C.³ Zeng, Z.M.⁴ Chu, P.K.⁵ Bilek, M.M.M.⁶ Brown, I.G.⁷

27
- 0035978408
- (2001) Surf. Coat. Technol. , vol.140 , pp. 215-224
- Gorokhovsky, V.I.¹ Bhat, D.G.² Shivpuri, R.³ Kulkarni, K.⁴ Bhattacharya, R.⁵

28
- 0035972894
- (2001) Surf. Coat. Technol. , vol.140 , pp. 82-92
- Gorokhovsky, V.I.¹ Bhattacharya, R.² Bhat, D.G.³

29
- 0033377792
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1985-2015
- Bhushan, B.¹

30
- 0000879286
- (1993) Phys. Rev. B , vol.48 , pp. 4777-4782
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶ Koskinen, J.⁷

31
- 0028429331
- (1994) Diamond Relat. Mater. , vol.3 , pp. 1056-1065
- Jungnickel, G.¹ Kühn, M.² Deutschmann, S.³ Richter, F.⁴ Stephan, U.⁵ Blaudeck, P.⁶ Frauenheim, T.⁷

32
- 0000981216
- (1995) J. Appl. Phys. , vol.77 , Issue.9 , pp. 4750-4756
- Lossy, R.¹ Pappas, D.L.² Ronnen, R.A.³ Doyle, J.P.⁴ Cuomo, J.J.⁵

33
- 0000162424
- (1997) Appl. Phys. Lett. , vol.71 , Issue.10 , pp. 1430-1432
- Satyanarayana, B.S.¹ Hart, A.² Milne, W.I.³ Robertson, J.⁴

34
- 0001685802
- (1997) Phys. Rev. B , vol.56 , pp. 14315-14321
- Walters, J.K.¹ Kühn, M.² Spaeth, C.³ Fischer, H.⁴ Richter, F.⁵ Newport, R.J.⁶

35
- 0006413423
- (1996) J. Appl. Phys. , vol.79 , Issue.9 , pp. 7234-7240
- Xu, S.¹ Tay, B.K.² Tan, H.S.³ Zhong, L.⁴ Tu, Y.Q.⁵ Silva, S.R.P.⁶ Milne, W.I.⁷

36
- 0031705472
- (1998) Thin Solid Films , vol.312 , pp. 160-169
- Xu, S.¹ Cheah, L.K.² Tay, B.K.³

37
- 0346046018
- (1997) Thin Solid Films , vol.308 , pp. 268-272
- Tay, B.K.¹ Shi, X.² Cheath, L.K.³ Flynn, D.I.⁴

38
- 0033332745
- (1999) Thin Solid Films , vol.355 , pp. 64-72
- Spaeth, C.¹ Kreissig, U.² Richter, F.³

39
- 0033728691
- (2000) Diamond Relat. Mater. , vol.9 , pp. 663-667
- Polo, M.C.¹ Andujar, J.L.² Hart, A.³ Robertson, J.⁴ Milne, W.I.⁵

40
- 0033729189
- (2000) Diamond Relat. Mater. , vol.9 , pp. 668-674
- Druze, B.¹ Yevtukhov, Y.² Novotny, V.³ Zaritsky, I.⁴ Kanarov, V.⁵ Ployakov, V.⁶ Rukavishnikov, A.⁷

41
- 0032692055
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1809-1830
- Muhl, S.¹ Mendez, J.M.²

42
- 0004346262
- Ion energy measurement in shielded vacuum arc with graphite cathode
- Jpn. J. Appl. Phys.
- Miyano, R.¹ Nagayama, M.² Takikawa, H.³ Sakaibara, T.⁴

43
- 0000280122
- (1999) Phys. Rev. B , vol.60 , pp. 10903-10907
- Alexandrou, I.¹ Scheibe, H.-J.² Kiel, C.J.³ Papworth, A.J.⁴ Amaratunga, G.A.J.⁵ Schultrich, B.⁶

44
- 0029388375
- (1995) Appl. Phys. A. , vol.61 , pp. 353-355
- Salo, J.¹ Lappalainen, R.² Antitila, A.³

45
- 0025840808
- (1991) Appl. Surf. Sci. , vol.47 , pp. 17-21
- Lascovich, J.C.¹ Giorgi, R.² Scaglione, S.³

46
- 0032065074
- (1998) J. Non-Cryst. Sol. , vol.227 , pp. 617-621
- Lee, J.¹ Collins, R.W.² Veerasamy, V.S.³ Robertson, J.⁴

47
- 0032182228
- (1998) Mater. Lett. , vol.37 , pp. 162-167
- Stanishevsky, A.¹

48
- 0032137785
- (1998) Diamond Relat. Mater. , vol.7 , pp. 1190-1195
- Stanishevsky, A.¹ Khriachtchev, L.² Akula, I.³

49
- 0032673742
- (1999) Chaos Solitons Fractals , vol.10 , pp. 2045-2066
- Stanishevsky, A.¹

50
- 0033165411
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1246-1250
- Stanishevsky, A.¹

51
- 0034707823
- (2000) Surf. Coat. Technol. , vol.123 , pp. 101-105
- Stanishevsky, A.¹ Lappalainen, R.²

52
- 0033906766
- (2000) Surf. Coat. Technol. , vol.124 , pp. 135-141
- Kim, J.-K.¹ Lee, K.-R.² Eun, K.Y.³ Chung, K.-H.⁴

53
- 0032098116
- (1998) Thin Solid Films , vol.323 , pp. 217-221
- Wei, A.¹ Chen, D.² Ke, N.³ Peng, S.⁴ Wong, S.P.⁵

54
- 0033504662
- (1999) Surf. Coat. Technol. , vol.120 , pp. 601-606
- Liu, E.L.¹ Shi, X.² Tan, H.S.³ Cheah, L.K.⁴ Sun, Z.⁵ Tay, B.K.⁶ Shi, J.R.⁷

55
- 0004209258
- US Patent No. 5,992,268
- (1997) Amorphous diamond coating of bladeS
- Decker, T.¹ Lundie, G.P.² Pappas, D.L.³ Welty, R.P.⁴ Parent, R.C.⁵

56
- 85058248479
- (2000) Surf. Coat. Technol. , vol.127 , pp. 247-251
- Sheeja, D.¹ Tay, B.K.² Lau, S.P.³ Shi, X.⁴ Shi, J.⁵ Li, Y.⁶ Ding, X.⁷ Liu, E.⁸ Sun, Z.⁹

57
- 0033503873
- (1999) Surf. Coat. Technol. , vol.120 , pp. 579-584
- Han, H.¹ Ryan, F.² McClure, M.³

58
- 0001083841
- (1995) Phys. Lett. A , vol.205 , pp. 287-289
- Hakovirta, M.¹ Salo, J.² Lappalainen, R.³ Antitila, A.⁴

59
- 0032594147
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1659-1676
- Lifshitz, Y.¹

60
- 0033167009
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1183-1192
- Hakovirta, M.¹ Tiainen, V.-M.² Pekko, P.³

61
- 0033164712
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1225-1228
- Hakovirta, M.¹

62
- 0033502982
- (1999) Surf. Coat. Technol. , vol.120 , pp. 709-717
- Vetter, J.¹ Nevoigt, A.²

63
- 0033534914
- (1999) Thin Solid Films , vol.339 , pp. 74-77
- Chen, Z.Y.¹ Yu, Y.H.² Zhao, J.P.³ Yang, S.Q.⁴ Shi, T.S.⁵ Liu, X.H.⁶ Luo, E.Z.⁷ Xu, J.B.⁸ Wilson, I.H.⁹

64
- 36449000665
- (1993) J. Appl. Phys. , vol.74 , pp. 4168-4173
- Chen, X.¹ Narayan, J.²

65
- 0034473994
- (2000) IEEE 19th International Symposium on Discharges and Electrical Insulation in Vacuum- Xi'an China , pp. 541-547
- Anders, A.¹ Ryan, R.W.² Fong, W.³ Bhatia, S.⁴

66
- 0029325023
- (1995) Mater. Lett. , vol.24 , pp. 153-156
- Anttila, A.¹ Salo, J.² Lappalainen, R.³

67
- 0031336524
- (1997) Adv. Mater. , vol.9 , pp. 1161-1164
- Anttila, A.¹ Lappalainen, R.² Tiainen, V.-M.³ Hakovirta, M.⁴

68
- 0001735350
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1478-1489
- Deuerler, F.¹ Van den Berg, H.² Tabersky, R.³ Freundlieb, A.⁴ Pies, M.⁵ Buck, V.⁶

69
- 0029675171
- (1996) Diamond Relat. Mater. , vol.5 , pp. 186-189
- Hakovirta, M.¹

70
- 0031268698
- (1997) Mater. Lett. , vol.33 , pp. 85
- Chen, Z.Y.¹ Zhao, J.P.² Yu, Y.H.³ Wang, X.⁴ Yang, S.Q.⁵ Shi, T.S.⁶ Liu, X.H.⁷

71
- 0033130856
- (1999) Vacuum , vol.53 , pp. 109-112
- Precht, W.¹ Pancielojko, M.² Czyzniewski, A.³

72
- 0032620587
- (1999) Diamond Relat. Mater. , vol.8 , pp. 830-833
- Faure, C.¹ Hänni, W.² Julia Schmutz, C.³ Gervanoni, M.⁴

73
- 0033548350
- (1999) Surf. Coat. Technol. , vol.113 , pp. 80-85
- Vandevelde, T.C.S.¹ Vandierendonck, K.² Van Stappen, M.³ Du Mong, W.⁴ Perremans, P.⁵

74
- 0029250683
- (1995) Thin Solid Films , vol.256 , pp. 148-154
- Wang, X.¹ Martin, P.J.² Kinder, T.J.³

75
- 0005638529
- (1996) Thin Solid Films , vol.291 , pp. 99-102
- McCulloch, D.G.¹ Merchant, A.R.²

76
- 0033716465
- (2000) Surf. Coat. Technol. , vol.128 , pp. 484-488
- Yu, L.J.¹ Wang, X.² Wang, X.H.³ Liu, X.H.⁴

77
- 0031276062
- (1997) Mater. Lett. , vol.33 , pp. 41-45
- Zhao, J.P.¹ Wang, X.² Chen, Z.Y.³ Yang, S.Q.⁴ Shi, T.S.⁵ Liu, X.H.⁶

78
- 0031547894
- (1997) Nucl. Instrum. Methods B , vol.127-128 , pp. 817-820
- Zhao, J.P.¹ Wang, X.² Chen, Z.Y.³ Yang, S.Q.⁴ Shi, T.S.⁵ Liu, X.H.⁶ Zou, S.C.⁷

79
- 0031999143
- (1998) Mater. Lett. , vol.34 , pp. 1-4
- Chen, Z.Y.¹ Yu, Y.H.² Zhao, J.P.³ Wang, X.⁴ Yang, S.Q.⁵ Shi, T.S.⁶ Liu, X.H.⁷ Lou, E.Z.⁸ Xu, J.B.⁹ Wilson, I.H.¹⁰

80
- 0032045527
- (1998) Thin Solid Films , vol.317 , pp. 380-383
- Takai, O.¹ Taki, Y.² Kitagawa, T.³

81
- 0031191129
- (1997) Electron. Lett. , vol.33 , pp. 1339-1340
- Cheah, L.K.¹ Xu, S.² Tay, B.K.³

82
- 22644448879
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 1094-1097
- Monteiro, O.R.¹

83
- 0034599699
- (2000) Surf. Coat. Technol. , vol.126 , pp. 81-88
- Witke, T.¹ Schuelke, T.² Schultrich, B.³ Siemroth, P.⁴ Vetter, J.⁵

84
- 4243430535
- D.A. Glocker, S.I. Shah (Ed.) Bristol, UK
- (1995) Handbook of Thin Film Process Technology
- Martin, P.J.¹

85
- 0004344335
- Wear resistant titanium nitride coatings for minting applications
- Manila, Philippines, Bangko Sentral ng, November
- (1997) Proc. 8th Technical Meeting of Mints in Asean
- Martin, P.J.¹ Yasbandah, H.² Tharle, R.³

86
- 0004298103
- Enhanced performance of proof coinage dies by filtered arc deposition
- Sun City, South Africa, pub. S.A. Mint Pty. Ltd., Johannesburg, March
- (1998) Proc. XXth Mint Director's Conference
- Martin, P.J.¹ Yasbandah, H.² Moffat, G.³ Gardiner, R.⁴

87
- 0031272258
- (1997) J. Mater. Sci. , vol.32 , pp. 6029-6038
- Konyashin, I.¹ Fox-Rabinovich, G.² Dodonov, A.³

88
- 0031213111
- (1997) IEEE Trans. Plasma Sci. , vol.25 , pp. 675-680
- Martin, P.J.¹ Bendavid, A.² Kinder, T.J.³

89
- 0030412496
- (1996) Surf. Coat. Technol. , vol.86 , pp. 271-278
- Martin, P.J.¹ Bendavid, A.² Kinder, T.J.³ Wielunski, L.⁴

90
- 0004277126
- (2000) Trans. Mech. Eng. , vol.24 , Issue.1 , pp. 67-73
- Vlasveld, A.C.¹ Doyle, E.D.² Wong, Y.C.³ Bendavid, A.⁴

91
- 0031546254
- (1997) Nucl. Instrum. Methods , vol.B121 , pp. 133-136
- Irie, M.¹ Ohara, H.² Nakayama, A.³ Kitagawa, N.⁴ Nomura, T.⁵

92
- 0032115265
- (1998) Mater. Chem. Phys. , vol.54 , pp. 317-320
- Irie, M.¹ Ohara, H.² Tsujioka, M.³ Nomura, T.⁴

93
- 0033079772
- (1999) Surf. Coat. Technol. , vol.112 , pp. 257-260
- Martin, P.J.¹ Bendavid, A.² Netterfield, R.P.³ Kinder, T.J.⁴ Jahan, F.⁵ Smith, G.⁶

94
- 0034140213
- (2000) Thin Solid Films , vol.360 , pp. 241-250
- Bendavid, A.¹ Martin, P.J.² Takikawa, H.³

95
- 0004344337
- (1999) Plasma Sources Sci. Technol. , vol.8 , pp. 8893
- Bilek, M.M.M.¹ Monteiro, O.R.² Brown, I.G.³

96
- 0031547833
- (1997) Nucl. Instrum. Methods B , vol.127 , pp. 821-826
- Monteiro, O.R.¹ Wang, Z.² Hou, P.Y.³ Brown, I.G.⁴

97
- 0033307875
- (1998) Proc. SPIE , vol.3789 , pp. 29-37
- Fulton, M.I.¹

98
- 0004357837
- (1999) 42 Ann. Tech. Conf. Proc. Society of Vacuum Coaters
- Fulton, M.I.¹

99
- 0027802020
- (1993) Thin Solid Films , vol.236 , pp. 20-26
- Ben-Shalom, A.¹ Kaplan, L.² Boxman, R.L.³ Goldsmith, S.⁴ Nathan, M.⁵

100
- 0028748954
- (1994) Thin Solid Films , vol.253 , pp. 1-8
- Kaplan, L.¹ Ben-Shalom, A.² Boxman, R.L.³ Golsmith, S.⁴ Nathan, M.⁵

101
- 13544270304
- (1996) Thin Solid Films , vol.290 , pp. 355-361
- Kaplan, L.¹ Rusman, I.² Boxman, R.L.³ Goldsmith, S.⁴ Nathan, M.⁵ Ben-Jacob, E.⁶

102
- 0029407349
- (1995) Surf. Coat. Technol. , vol.76 , pp. 167-173
- Anders, S.¹ Anders, A.² Rubin, M.³ Wang, Z.⁴ Raoux, S.⁵ Kong, F.⁶ Brown, I.G.⁷

103
- 0033393425
- (1999) Surf. Coat. Technol. , vol.116 , pp. 956-962
- Bolt, H.¹ Koch, F.² Rodet, J.L.³ Karpov, D.⁴ Menzel, S.⁵

104
- 0004219051
- unpublished
- Bendavid, A.¹ Martin, P.J.²

105
- 0034300631
- (2000) Vacuum , vol.59 , pp. 159-167
- Kimura, K.¹ Izumi, K.² Takikawa, H.³ Sakakibara, T.⁴

106
- 0035874098
- (2001) Thin Solid Films , vol.386 , pp. 276-280
- Takikawa, H.¹ Miyano, R.² Sakaibara, T.³ Bendavid, A.⁴ Martin, P.J.⁵ Matsumuro, A.⁶ Tsutsumi, K.⁷

107
- 0004356917
- Unpublished data

108
- 0034009291
- (2000) Surf. Coat. Technol. , vol.125 , pp. 157-160
- Straumal, B.¹ Gust, W.² Vershinin, N.³ Dimitriou, R.⁴ Rabkin, E.⁵

109
- 0033883332
- (2000) Thin Solid Films , vol.359 , pp. 46-54
- He, J.L.¹ Won, K.W.² Chang, J.T.³

110
- 0033359374
- (1999) Thin Solid Films , vol.354 , pp. 169-175
- Bendavid, A.¹ Martin, P.J.² Wieczorek, L.³

111
- 0001151364
- (1999) Rev. Sci. Instrum. , vol.70 , pp. 4328-4330
- Avekh, M.¹ Thibadeau, B.M.² Monteiro, O.R.³ Brown, I.G.⁴

112
- 0003192268
- (1990) J. Appl. Phys. , vol.85 , pp. 8322-8326
- Ding, X.Z.¹ Wu, X.Y.² Chiah, M.C.³ Cheung, W.C.⁴ Wong, S.P.⁵ Wilson, I.H.⁶ Zhu, X.R.⁷ Shen, H.L.⁸ Liu, X.H.⁹

113
- 0034292470
- (2000) Surf. Coat. Technol. , vol.132 , pp. 217-221
- Chun, S.Y.¹ Chayahara, A.²

114
- 0031223620
- (1997) Surf. Coat. Technol. , vol.93 , pp. 158-167
- Anders, A.¹

115
- 0346686697
- (2000) Surf. Coat. Technol. , vol.128 , pp. 231-235
- Zhang, T.¹ Tang, B.Y.² Zeng, Z.M.³ Chen, Q.C.⁴ Tian, X.B.⁵ Kwok, T.K.⁶ Chu, P.K.⁷ Monteiro, O.R.⁸ Brown, I.G.⁹

116
- 2142806777
- (1998) Surf. Coat. Technol. , vol.108 , pp. 138-147
- Verprek, S.¹ Nesladek, P.² Niederhofer, A.³ Glatz, F.⁴ Jilek, M.⁵ Sima, M.⁶

117
- 0032288583
- (1998) Surf. Coat. Technol. , vol.110 , pp. 168-172
- Misina, M.¹ Musil, J.² Kadlec, S.³

118
- 0033438070
- (1999) J. Vac. Sci. Technol. , vol.A17 , Issue.5 , pp. 2401-2420
- Verprek, S.¹

119
- 0034310610
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 145-151
- Holubar, P.¹ Jilek, M.² Sima, M.³

120
- 0034092121
- (2000) Surf. Coat. Technol. , vol.125 , pp. 322-330
- Musil, J.¹

121
- 0004224715
- (1999) Surf. Coat. Technol. , vol.120 , pp. 79-183
- Musil, J.¹ Zeman, P.² Hruby, H.³ Mayrhofer, P.H.⁴

122
- 0038832586
- (1998) Surf Coat. Technol. , vol.108 , pp. 154-159
- Grimberg, I.¹ Zhitomersky, V.N.² Boxman, R.L.³ Goldsmith, S.⁴ Weiss, B.Z.⁵

123
- 0034091724
- (2000) Surf. Coat. Technol. , vol.125 , pp. 257-262
- Boxman, R.L.¹ Zhitomersky, V.N.² Grimberg, I.³ Rapoport, L.⁴ Goldsmith, S.⁵ Weiss, B.Z.⁶

124
- 0004301465
- (1998) Thin Solid Films , vol.326 , pp. 34-142
- Zhitomersky, V.N.¹ Grimberg, I.² Rapoport, L.³ Travitzky, N.A.⁴ Boxman, R.L.⁵ Goldsmith, S.⁶ Raihel, A.⁷ Lapsker, I.⁸ Weiss, B.Z.⁹

125
- 0004209262
- Garmisch-Partenkirchen, September 2000 (to be published in Surf. Coat. Technol.)
- (2000) Proc. PSE
- Martin, P.J.¹ Bendavid, A.²

126
- 0001413519
- (1986) Sov. Phys. Solid State , vol.28 , pp. 1881-1885
- Golovashkin, A.I.¹ Zhurkin, B.G.² Karuzskii, A.L.³ Krasnosvobodtsev, S.I.⁴ Martovitskii, V.P.⁵ Pechen, E.V.⁶ Rodin, V.V.⁷ Stepanov, Yu.I.⁸ Shirkov, A.V.⁹

127
- 0001271487
- (1999) Appl. Phys. A , vol.69
- Duhalde, S.¹ Colaco, R.² Audebert, F.³ Perrone, A.⁴ Zocco, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.