Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films

Diamond and Related Materials

Volumn 8, Issue 7, 1999, Pages 1183-1192

  Hakovirta, M ^a,b   Tiainen, V M ^b   Pekko, P ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Cathodic vacuum arc; Filtering; Graphite macroparticles; Tetrahedral amorphous carbon

Indexed keywords

CARBON; CATHODES; COATINGS; DEPOSITION; DESIGN; ELECTRIC ARCS; GRAPHITE; MAGNETIC FILTERS; PARTICLES (PARTICULATE MATTER); PLASMAS; VACUUM APPLICATIONS;

FILTERED CATHODIC VACUUM ARC DEPOSITION; GRAPHITE MACROPARTICLES; MAGNETIC FILTERING DESIGNS; TETRAHEDRAL AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

CARBON; COATING; GRAPHITE; QUALITY CONTROL;

EID: 0033167009     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00111-9     Document Type: Review

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