Electrical properties of nitrogen incorporated tetrahedral amorphous carbon films

Thin Solid Films

Volumn 339, Issue 1-2, 1999, Pages 74-77

  Chen, Z Y ^a   Yu, Y H ^a   Zhao, J P ^a   Yang, S Q ^a   Shi, T S ^a   Liu, X H ^a   Luo, E Z ^b   Xu, J B ^b   Wilson, I H ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Electrical properties and measurements; Nitrogen incorporating; Tetrahedral amorphous carbon

Indexed keywords

ANNEALING; CARBON; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC VARIABLES MEASUREMENT; GRAPHITE; HALL EFFECT; NITROGEN; PRESSURE EFFECTS;

TETRAHEDRAL AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 0033534914     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01066-9     Document Type: Article

References (14)

1. D.R. McKenzie, D.A. Muller, B.A. Paithrop, et al., Phys. Rev. Lett. 67 (1991) 773.
2. D.R. McKenzie, Y. Yin, N.A. Marks, B.A. Davis, B.A. Davis, B.A. Paithorp, G.A.J. Amaratunga, V.S. Veerasamy, Diamond Relat. Mater. 3 (1994) 353.
3. J.P. Zhao, X. Wang, Z.Y. Chen, et al., Nucl. Instrum, Meth. B 127/128 (1997) 817.
4. P. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, J. Koskinen, Phys. Rev. B 48 (1991) 4777.
5. D.A. Drabold, P.A. Fedders, M.P. Grumbach, Phys. Rev. B54 (1996) 5480.
6. G.A.J. Amaratunga, D.E. Segal, D.R. McKenzie, Appl. Phys. Lett. 59 (1991) 69.
7. V.S. Veerasamy, G.A.J. Amaratunga, C.A. Davis, A.E. Timbs, W.I. Milne, D.R. McKenzie, J. Phys: Condens. Matter. 5 (1993) L169.
8. V.S. Veerasamy, J. Yuan. G.A.J. Amaratunga, W.I. Milne, K.W.R. Gilkes, M. Weiler, L.M. Brown, Phys. Rev. B 48 (1993) 17954.
9. J. Taue, in: M.H. Brodsy (Ed.), Amorphous Semiconductors, Plenum, New York, 1973.
10. M. Morgan, Thin Solid Films 7 (1971) 313.
11. C.J. Adkins, S.M. Freake, E.M. Hamiltson, Philos. Mag. 22 (1970) 183.
12. N.F. Mott, E.A. Davis, Electronic Processes in Non-Crystalline Materials, Clarendon, Oxford, 1971, pp. 197-219.
13. C.A. Davis, D.R. McKenzie, Y. Yin, E. Kravtchinskaia, G.A.J. Amaratunga, V.S. Veerasamy, Philos. Mag. B 49 (1993) 1133.
14. J.J. Hauser, J. Non-Cryst Solids 23 (1977) 21.