The ion current density and spectroscopic study in a straight magnetic filtering arc deposition system

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 201-206

  Yoon, Joo S ^a   Han, Jeon G ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Arc deposition; Cathodic arc discharge; Film formation; Optical emission spectroscopy; Surface morphology

Indexed keywords

CARRIER CONCENTRATION; CURRENT DENSITY; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; IONIZATION OF GASES; MAGNETIC FIELD EFFECTS; MORPHOLOGY; PLASMA APPLICATIONS; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS;

CATHODIC ARC DISCHARGES; LANGMUIR PROBE METHOD; MAGNETIC FILTERING ARC DEPOSITION SYSTEMS; OPTICAL EMISSION SPECTROSCOPY (OES);

VACUUM DEPOSITED COATINGS;

EID: 17344385061     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00348-4     Document Type: Article

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