Characteristics of carbon nitride films prepared by magnetic filtered plasma stream

Thin Solid Films

Volumn 323, Issue 1-2, 1998, Pages 217-221

  Wei, Aixiang ^a   Chen, Dihu ^b   Ke, Ning ^b   Peng, Shaoqi ^a   Wong, S P ^b  

^a SUN YAT SEN UNIVERSITY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Diamond; Fourier transform infrared spectroscopy; Nitrides; X ray photoelectron spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; ENERGY GAP; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; LIGHT ABSORPTION; MAGNETIC FIELD EFFECTS; NITRIDES; PLASMA APPLICATIONS; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; MAGNETIC FIELD FILTERED PLASMA STREAM DEPOSITION SYSTEM; VICKERS HARDNESS;

MAGNETIC FILMS;

EID: 0032098116     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01036-5     Document Type: Article

References (13)

1. A.Y. Liu, M.L. Cohen, Science 245 (1989) 841.
2. A.Y. Liu, M.L. Cohen, Phys. Rev. B41 (1990) 10727.
3. C. Niu, Y.Z. Lu, C.M. Lieber, Science 261 (1993) 334.
4. D. Li, Y.-W. Chung, S. Yang, M.-S. Wong, W.D. Spyoul, J. Vac. Sci. Technol. A12 (1994) 1470.
5. Z.-B. Zhang, Y.-A. Li, S.-S. Xie, G.-Z. Yang, J. Mater. Sci. Lett. 14 (1995) 1742.
6. Z. Wu, Y. Yu, X. Liu, Appl. Phys. Lett. 68 (1996) 1291.
7. Y. Zhang, Z. Zhou, H. Li, Appl. Phys. Lett. 68 (1996) 634.
8. K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hansen, A.Y. Liu, I.C. Wu, Phys. Rev. B49 (1994) 5034.
9. A. Wei, D. Chen, S. Peng, N. Ke, S.P. Wong, Diamond Related Mater. 6 (1997) 983.
10. J.H. Kaufman, S. Metin, D.D. Saperstein, Phys. Rev. B39 (1989) 13053.
11. Z. John Zhang, S. Fan, C.M. Lieber, Appl. Phys. Lett. 66 (1995) 3582.
12. A. Mansour, D. Ugolini, Phys. Rev. B47 (1993) 10201.
13. D. Marton, K.J. Boyd, A.H. Al-Bayai, S.S. Toaorov, J.W. Rabalias, Phys. Rev. Lett. 73 (1994) 118.