Vacuum arc ion and plasma source Raduga 5 for materials treatment

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 893-895

  Ryabchikov, A I ^a   Stepanov, I B ^a   Dektjarev, S V ^a   Sergeev, O V ^a  

^a Nuclear Physics Institute   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84961768561     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148585     Document Type: Conference Paper

References (20)

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