Investigations of forming metal-plasma flows filtered from microparticle fraction in vacuum arc evaporators

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 810-812

  Ryabchikov, A I ^a   Stepanov, I B ^a  

^a Nuclear Physics Institute   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85007650018     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148574     Document Type: Conference Paper

References (15)

1. C. W. Kimblin, IEEE Trans. Plasma Sci. ITPSBD 10, 322 (1982).
2. L. P. Sablev, Yu. I. Dolotov, R. I. Stupak, and V. A. Osirov, Prib. Tekh. Ebsp. PRTEAJ 4, 247 (1976).
3. A. A. Snaper, U.S. Patent No. 3 625 848 (1971).
4. A. M. Dorodnov, Sov. Phys. Tech. Phys. SPTPA3 23, 1058 (1978).
5. A. M. Dorodnov and B. A. Petroson, Sov. Phys. Tech. Phys. SPTPA3 26, 304 (1981).
6. P. J. Martin, J. Mater. Sci. JMTSAS 21, 1 (1986).
7. G. A. Mesyats, Ectons, Part 1 (Nauka, Ecaterinburg, 1993) (in Russian).
8. J. E. Daalder, J. Phys. D: Appl. Phys. JPAPBE 16, 2379 (1976).
9. I. I. Aksenov, V. G. Padalka, and V. M. Khoroshikh, Formation of Metal Plasma Flows Review (CNIIatomuniform, Moscow, 1984).
10. A. I. Morozov, Dokl. Akad. Nauk SSSR DANKAS 163, 1363 (1965).
11. A. Anders, S. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, Metal Plasma Immersion Ion Implantation And Deposition Using Vacuum Arc Plasma Sources, LBL-34057 (LBL, Berkeley, 1993).
12. A. I. Ryabchikov and I. B. Stepanov, in Proceedings of the IVth All-Russian Conference on Construction Materials Modification by Charged Particle Beams. Tomsk 1996 (AuditInform, Tomsk, 1996), 29.
13. A. I. Ryabchikov, S. V. Dektjarev, and I. B. Stepanov, Rev. Sci. Instrum. RSINAK 65, 3126 (1994).
14. I. G. Brown, X. Godechot, and K. M. Yu, Appl. Phys. Lett. APPLAB 58, 1392 (1991).
15. A. I. Ryabchikov, I. B. Stepanov, S. V. Dektjarev, and O. V. Sergeev, Rev. Sci. Instrum., these proceedings.