Sputtering and chemical erosion during CNx synthesis by ion beam assisted filtered cathodic arc evaporation

Thin Solid Films

Volumn 355, Issue , 1999, Pages 64-72

  Spaeth, C ^a   Kreissig, U ^b   Richter, F ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CATHODES; ELASTICITY; EVAPORATION; FILM PREPARATION; NITRIDES; NITROGEN; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS;

CHEMICAL EROSION; ELASTIC COIL DETECTION (ERD) ANALYSIS; ION ASSISTED FILTERED CATHODIC ARC EVAPORATION;

AMORPHOUS FILMS;

EID: 0033332745     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00482-4     Document Type: Article

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