Spectroscopic ellipsometry studies of tetrahedral amorphous carbon prepared by filtered cathodic vacuum arc technique

Thin Solid Films

Volumn 312, Issue 1-2, 1998, Pages 160-169

  Shi, Xu ^a   Cheah, L K ^a   Tay, B K ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Dielectric constants; Ion energy; Spectroscopic ellipsometry

Indexed keywords

CARBON; DEPOSITION; ELLIPSOMETRY; PERMITTIVITY;

FILTERED CATHODIC VACUUM ARC (FCVA) TECHNIQUE;

AMORPHOUS FILMS;

EID: 0031705472     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0040-6090(97)00742-6     Document Type: Article

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