Structure and tribological properties of carbon and carbon nitride films, obtained by the ARC method

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 109-112

  Precht, W ^a   Pancielejko, M ^a   Czyzniewski, A ^b  

^a KOSZALIN UNIVERSITY OF TECHNOLOGY   (Poland)

^b Technology Transfer Centre   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; FRICTION; MICROHARDNESS; NITRIDES; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION); TRIBOLOGY; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

ARC; CARBON NITRIDE; CATHODE ARC PLASMA DEPOSITION; PHYSICAL VAPOR DEPOSITION;

AMORPHOUS FILMS;

EID: 0033130856     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00403-5     Document Type: Article

References (17)

1. Coll BF, Chhowalla M. Surf Coat Technol 1996;79:76.
2. Walter KC, Kung H, Levine T, Tesmer JT, Kodali P, Wood BP, Rej DJ, Nastasi M, Koskinen J, Hirvonen J-P. Surf Coat Technol 1995;74-75:734.
3. Charier C, Jacqout P, Denisse E, Brissot J, Bossut F, Amouroux A, Dervieux G. Diamond Relat Mater 1994;3:41.
4. Richter F, Bewilogua K, Kupfer H, Mühling I, Rau B, Rother B, Schumacher D. Thin Solid Films 1992;212:245.
5. Rother B, Siegel J, Breuer K, Mühling I, Deutschmann S, Vetter J, Trommer G, Rau B, Heiser C. J Mater Res 1991;6(1):101.
6. Rother B. J Vac Sci Technol A 1994;12(4):1457.
7. McKenzie DR, Yin Y, Marks NA, Davis CA, Pailthore BA, Amaratunga GAJ, Veerasamy VS. Diamond Relat Mater 1994;3:353.
8. Falabella S, Boercker DB, Sander DM. Thin Solid Films 1993;236:82.
9. Lifshitz Y, Kasi SR, Rabalais JW, Eckstein W. Phys Rev B 1990;41:10468.
10. Schwan J, Ulrich S, Jung K, Ehrhardt H, Samlenski R, Brenn R. Diamond Relat Mater 1995;4:304.
11. Hirvonen JP, Koskinen J, Jervis JR, Nastasi M. Surf Coat Technol 1996;80:139.
12. Davis CA, Knowles KM, Amaratunga GAJ. Surf Coat Technol 1995;76-77:316.
13. Precht W, Czyzniewski A, Czerwosz E, Pancielejko M, Myslinski P. CVD 1996;3(3):213.
14. Ronkainen H, Linkonen J, Koskinen J, Varjus S. Surf Coat Technol 1996;79:87.
15. Aksenov II, Belous VA, Padalka VG, Khoroshikh VM. Sov J Plasma Phys 1978;4:425.
16. Liu AY, Cohen ML. Science 1989;245:841.
17. Wang X, Martin PJ, Kinder TJ. Thin Solid Films 1995;256:148.