Preparation of thin films by filtered arc deposition and ion assisted arc deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 817-820

  Zhao, J P ^a   Wang, X ^a   Chen, Z Y ^a   Yang, S Q ^a   Shi, T S ^a   Liu, X H ^a   Zou, S C ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIAMOND FILMS; FILM GROWTH; FILM PREPARATION; MORPHOLOGY; OPTICAL PROPERTIES; TITANIUM NITRIDE;

FILTERED ARC DEPOSITION (FAD); ION ASSISTED ARC DEPOSITION (IAAD);

THIN FILMS;

EID: 0031547894     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00013-X     Document Type: Article

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