TiN thin films deposited by filtered arc-evaporation: Structure, properties and applications

Journal of Materials Science

Volumn 32, Issue 22, 1997, Pages 6029-6038

  Konyashin, I ^a,d   Fox Rabinovich, G ^b   Dodonov, A ^c  

^a Hard and Refractory Met Res Inst   (Russian Federation)

^b RIMET Comp   (Russian Federation)

^c VIT Ltd   (Russian Federation)

^d MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CRYSTAL MICROSTRUCTURE; DEPOSITION; EVAPORATION; HARDNESS; LATTICE CONSTANTS; PLASMA APPLICATIONS; RESIDUAL STRESSES; THIN FILMS; TITANIUM COMPOUNDS; TOUGHNESS;

FILTERED ARC EVAPORATION; TITANIUM NITRIDE;

PROTECTIVE COATINGS;

EID: 0031272258     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018679414707     Document Type: Article

References (29)

1. A. MATTHEWS and A. R. LEFKOW, Thin Solid Films 126 (1985) 283.
2. J. E. DAALDER, J. Phys. D 9 (1976) 2379.
3. Idem, Physica C 104 (1981) 91.
4. H.-D. STEFFENS, M. MACK, K. MOEHWALD and K. REICHEL, Surf. Coating Technol. 46 (1991) 65.
5. H. RHANDHAWA and P. C. JOHNSON, ibid. 31 (1987) 303.
6. E. ERTUERK, H.-J. HEUVEL and H.-G. DEDERICHS, ibid. 39/40 (1989) 455.
7. V. M. LUNEV, V. D. OVCHARENKO and V. M. KHOROSHIKH, Sov. Phys-Tech. Phys. 22 (1977) 855.
8. I. KONYASHIN, E. LEONOV, A. ANIKEEV and A. ZARAHKANI, Sov. Powder Met. Metals Ceramics 28 (1990) 816.
9. I. KONYASHIN, A. ZARAHKANI and E. LEONOV, Sov. J. Non-Ferrous Met. 5 (1988) 76.
10. I. KONYASHIN, Surf. Coating Technol. 71 (1995) 277.
11. A. ERDEMIR and C. CHENG, J. Vac. Sci. Technol. A 1 (1989) 2486.
12. J.-E. SUNDREN, Thin Solid Films 128 (1985) 21.
13. I. AKSENOV, V. BELOUS, V. PADALAKA and V. KHROSHIKH, Sov. J. Plasma Phys. 4 (1979) 425.
14. A. DORODNOV, S. MUBOYDZHAN, Y. PAMELOV and A. STRUKOV, J. Appl. Mech. Tech. Phys 22 (1981) 28.
15. I. DEMIDENKO, N. LOMINO and V. PADALKA, Sov. Phys. Tech. Phys 21 (1976) 284.
16. D. SANDERS and E. PYLE, J. Vac. Sci. Technol. A 5 (1987) 2728.
17. D. SANDERS, ibid. 7 (1989) 2339.
18. V. CHERNYAEV and V. KARZE, Radio Electron. Commun. Syst. 25 (1982) 68.
19. I. AKSENOV, V. BELOUS, V. PADALKA and V. KHOROSHIKH, Instrum. Exp. Tech. (USSR) 21 (1978) 2.
20. I. AKSENOV, A. BELOKHVOSTIKOV, V. PADALKA, N. REPALOV and V. KHOROSHIKH, Plasma. Phys. Contr. Fussion 28 (1986) 761.
21. A. DORODNOV and S. MIROSHKIN, High Temp. (USSR) 18 (1980) 821.
22. I. AKSENOV, V. BREN, V. PADALKA and V. KHOROSHIKH, Sov. Phys. Tech. Phys. 7 (1981) 497.
23. K. AKARI, H. TAMAGAKI, T. KUMAKIRI, K. TSUJI, E. KON and C. TAI, Surf. Coating Technol. 43/44 (1990) 312.
24. C. TAI, E. KON and K. AKARI, Surf. Coating Technol. 43/44 (1990) 324.
25. P. MARTIN, R. NETTERFIELD, A. BENDAVID and T. KINDER, in Annual Technical Conference Proceedings of the Society for Vacuum Coaters (Society of Vacuum Coates, Boston, 1993) p. 375.
26. P. MARTIN, R. NETTERFIELD and T. KINDER, Int. Appl. 16 (1992) 959.
27. P. MARTIN, R. NETTERFIELD, A. BENDAVID and T. KINDER, Surf. Coating Technol. 136 (1992) 54.
28. G. BARINOV, A. DODONOV and V. OGAY, "Ion-plating technology", (Machinostroenie, Moscow, 1987) p. 34.
29. I. AKSENOV, Y. ANTUFEV and V. BREN, Phys. Chem. Mater. Treatment 4 (1981) 43.