Improving yield, accuracy and complexity in surface tension self-assembled MOEMS

Sensors and Actuators, A: Physical

Volumn 88, Issue 3, 2001, Pages 273-283

  Syms, R R A ^a   Gormley, C ^b   Blackstone, S ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b BCO Technologies (NI) Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; PHOTORESISTS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES; SURFACE TENSION;

MICRO-OPTO-MECHANICAL SYSTEMS (MOEMS); SELF ASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 0034818627     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00523-9     Document Type: Article

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