Three dimensional silicon triple-hot-wire anemometer based on polyimide joints

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 93-98

  Ebefors, Thorbjorn ^a   Kalvesten, Edvard ^a   Stemme, Goran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; ETCHING; FLOW MEASUREMENT; MICROMACHINING; POLYIMIDES; SENSORS; SHRINKAGE; SILICON; THERMAL EFFECTS; TURBULENT FLOW;

BULK MICROMACHINING; SILICON TRIPLE HOT WIRE ANEMOMETERS; THERMAL SHRINKAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0031676413     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)