Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers

IEEE Photonics Technology Letters

Volumn 8, Issue 1, 1996, Pages 95-97

  Kiang, Meng Hsiung ^a   Solgaard, Olav ^a,b   Muller, Richard S ^a,c   Lau, Kam Y ^a,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c IEEE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; LASER ACCESSORIES; MICROMACHINING; MIRRORS; SEMICONDUCTING SILICON;

EXTERNAL CAVITY SEMICONDUCTOR LASERS; SILICON MICROMACHINED MICROMIRRORS;

SEMICONDUCTOR LASERS;

EID: 0029736623     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.475790     Document Type: Article

References (8)

1. A. T. Schremer and C. L. Tang, "External-cavity semiconductor laser with 1000 GHz continuous piezoelectric tuning range," IEEE Photon. Technol Lett., vol. 2, no. 1, pp. 3-5, 1990.
2. W. R. Trutna and L. F. Stokes, "Continuously tuned external cavity semiconductor laser," J. Lightwave Technol., vol. 11, no. 8, pp 1279-1286, 1993.
3. J. Yu, M. Schell, M. Schulze, and D. Bimberg, "Fourier-limited 1.6-ps pulses with variable repetition rate from 1 to 26 GHz by passive mode-locking of a semiconductor laser in an external cavity," IEEE Photon. Technol. Lett., vol. 7, no. 5, pp. 467-469, 1995.
4. D. M. Bird, R. M. Fatah, M. K. Cox, P. D. Constantine, J. C. Regnault, and K. H. Cameron, "Miniature packaged actively mode-locked semiconductor laser with tunable 20 ps transform limited pulses," Electron. Lett., vol. 26, no. 25, pp. 2086-2087, 1990.
5. O. Solgaard, M. Daneman, N. C. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Optoeletronic packaging using silicon surface-micromachined alignment mirrors," IEEE Photon. Technol. Lett., vol. 7, no. 1, pp. 41-43, 1995.
6. M.-H. Kiang, O. Solgaard, M. Daneman, N. C. Tien, R. S. Muller, and K. Y. Lau, "High-precision silicon-micromachined micromirrors with on-chip actuation for external-cavity semiconductor lasers," in CLEO/QELS'95, 1995 Tech. Dig. Ser., Baltimore, MD, vol. 15, pp. 248-249, May 1995.
7. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, "Micro-machined three-dimensional micro-optics for free-space optical system," IEEE Photon. Technol. Lett., vol. 6, no. 12, pp. 1445-1447, 1994.
8. W. C. Tang, "Electrostatic comb drive for resonant sensor and actuator applications," Ph.D. Thesis, Univ. of California, Berkeley, 1990.