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Volumn 5, Issue 1, 1996, Pages 10-17

Surface-micromachined components for articulated microrobots

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC DEVICES; END EFFECTORS; FRICTION; JOINTS (STRUCTURAL COMPONENTS); MANIPULATORS; MICROMACHINING; STEPPING MOTORS; SUBSTRATES; SURFACES;

EID: 0030106402     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.485210     Document Type: Article
Times cited : (82)

References (19)
  • 4
    • 0026986188 scopus 로고
    • Design considerations of a piezoelectric-on-silicon microrobot
    • Dec.
    • |4] J. G. Smits, "Design considerations of a piezoelectric-on-silicon microrobot," Sensors and Actuators A, vol. 35, pp. 129-135, Dec. 1992.
    • (1992) Sensors and Actuators A , vol.35 , pp. 129-135
    • Smits, J.G.1
  • 6
    • 0027876248 scopus 로고
    • Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
    • Dec.
    • M. Ataka, A. Omodaka, N. Takeshima, and H. Fujita, "Fabrication and operation of polyimide bimorph actuators for a ciliary motion system," J. Microelectromechanical Syst., vol. 2, pp. 146-150, Dec. 1993.
    • (1993) J. Microelectromechanical Syst. , vol.2 , pp. 146-150
    • Ataka, M.1    Omodaka, A.2    Takeshima, N.3    Fujita, H.4
  • 11
    • 5344232563 scopus 로고
    • Surface micromachined microelectromechanical components for articulated microrobots
    • Stockholm, Sweden, June 25-29
    • _, "Surface micromachined microelectromechanical components for articulated microrobots," presented at the 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95), Stockholm, Sweden, June 25-29, 1995.
    • (1995) 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95)
  • 13
    • 5344226103 scopus 로고    scopus 로고
    • More information can be found in the World Wide Web site of http://www.mcnc.org/HTML/ETD/MEMS/memshome.html
  • 15
    • 0025723097 scopus 로고
    • Microtribology related MEMS: Concepts, measurements, applications
    • Nara, Japan, Jan. 30-Feb. 2
    • R. Kaneko, "Microtribology related MEMS: Concepts, measurements, applications," in Proc. IEEE Workshop on Micro Electro Mechanical Syst., Nara, Japan, Jan. 30-Feb. 2, 1991, pp. 1-14.
    • (1991) Proc. IEEE Workshop on Micro Electro Mechanical Syst. , pp. 1-14
    • Kaneko, R.1
  • 18
    • 0028098290 scopus 로고
    • Analysis of closed-loop control of parallelplate electrostatic microgrippers
    • May 8-13
    • P. B. Chu and K. S. J. Pister, "Analysis of closed-loop control of parallelplate electrostatic microgrippers," in Proc. IEEE Int. Conf. Robotics and Automation, May 8-13, 1994, pp. 820-850.
    • (1994) Proc. IEEE Int. Conf. Robotics and Automation , pp. 820-850
    • Chu, P.B.1    Pister, K.S.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.