Surface-micromachined components for articulated microrobots

Journal of Microelectromechanical Systems

Volumn 5, Issue 1, 1996, Pages 10-17

  Yeh, Richard ^b,c   Kruglick, Ezekiel J J ^b,d,e   Pister, Kristofer S J ^a,b,c,e,f  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d Jet Propuls Lab Ctr Space M

^e UCLA ^*

^f UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); ELECTROSTATIC DEVICES; END EFFECTORS; FRICTION; JOINTS (STRUCTURAL COMPONENTS); MANIPULATORS; MICROMACHINING; STEPPING MOTORS; SUBSTRATES; SURFACES;

HOLLOW TRIANGULAR BEAMS; LINEAR ELECTROSTATIC STEPPER MOTORS; MECHANICAL COUPLINGS; REVOLUTE JOINTS; ROBOT LINKS; SURFACE MICROMACHINED LINK; THIN FILM POLYSILICON;

ROBOTS;

EID: 0030106402     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.485210     Document Type: Article

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