-
1
-
-
0029181441
-
Steering mechanism and swimming experiment of micro mobile robot in water
-
T. Fukuda, A. Kawamoto, F. Arai, and H. Matsuura, "Steering mechanism and swimming experiment of micro mobile robot in water," in Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS '95), 1995, pp. 300-305.
-
(1995)
Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS '95)
, pp. 300-305
-
-
Fukuda, T.1
Kawamoto, A.2
Arai, F.3
Matsuura, H.4
-
2
-
-
0029205556
-
Active catheter with multi-link structure based on silicon micromachining
-
G. Lim, K. Minami, M. Sugihara, M. Uchiyama, and M. Esashi, "Active catheter with multi-link structure based on silicon micromachining," in Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS '95), 1995, pp. 116-121.
-
(1995)
Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS '95)
, pp. 116-121
-
-
Lim, G.1
Minami, K.2
Sugihara, M.3
Uchiyama, M.4
Esashi, M.5
-
3
-
-
0026375142
-
Analyzing the dynamics of ants and application to microrobots
-
I. Shimoyama, H. Miura, C. Kimura, and M. Kikuta, "Analyzing the dynamics of ants and application to microrobots," in Proc. ASME Winter Ann. Meet., Dynamic Systems and Control, Micromechanical Sensors, Actuators, and Systems, 1991, vol. 32, pp. 279-284.
-
(1991)
Proc. ASME Winter Ann. Meet., Dynamic Systems and Control, Micromechanical Sensors, Actuators, and Systems
, vol.32
, pp. 279-284
-
-
Shimoyama, I.1
Miura, H.2
Kimura, C.3
Kikuta, M.4
-
4
-
-
0026986188
-
Design considerations of a piezoelectric-on-silicon microrobot
-
Dec.
-
|4] J. G. Smits, "Design considerations of a piezoelectric-on-silicon microrobot," Sensors and Actuators A, vol. 35, pp. 129-135, Dec. 1992.
-
(1992)
Sensors and Actuators A
, vol.35
, pp. 129-135
-
-
Smits, J.G.1
-
5
-
-
0028388436
-
Insect-model based microrobot with elastic hinges
-
Mar.
-
K. Suzuki, I. Shimoyama, and H. Miura, "Insect-model based microrobot with elastic hinges," in J. Microelectromechanical Syst., vol. 3, pp. 4-9, Mar. 1994.
-
(1994)
J. Microelectromechanical Syst.
, vol.3
, pp. 4-9
-
-
Suzuki, K.1
Shimoyama, I.2
Miura, H.3
-
6
-
-
0027876248
-
Fabrication and operation of polyimide bimorph actuators for a ciliary motion system
-
Dec.
-
M. Ataka, A. Omodaka, N. Takeshima, and H. Fujita, "Fabrication and operation of polyimide bimorph actuators for a ciliary motion system," J. Microelectromechanical Syst., vol. 2, pp. 146-150, Dec. 1993.
-
(1993)
J. Microelectromechanical Syst.
, vol.2
, pp. 146-150
-
-
Ataka, M.1
Omodaka, A.2
Takeshima, N.3
Fujita, H.4
-
7
-
-
0010316579
-
Microrobot actuated by a vibration energy field
-
T. Yasuda, I. Shimoyama, and H. Miura, "Microrobot actuated by a vibration energy field," in Tech. Dig. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), 1993, pp. 42-45.
-
(1993)
Tech. Dig. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
, pp. 42-45
-
-
Yasuda, T.1
Shimoyama, I.2
Miura, H.3
-
8
-
-
0026991048
-
Three dimensional structures made with microfabricated hinges
-
S. R. Burgett, K. S. J. Pister, and R. S. Fearing, "Three dimensional structures made with microfabricated hinges," in Proc. ASME Winter Ann. Meet., Micromechanical Syst., 1992, pp. 1-11.
-
(1992)
Proc. ASME Winter Ann. Meet., Micromechanical Syst.
, pp. 1-11
-
-
Burgett, S.R.1
Pister, K.S.J.2
Fearing, R.S.3
-
9
-
-
0026881818
-
Microfabricated hinges
-
June
-
[9J K. S. J. Pister, M. W. Judy, S. R. Burgett, and R. S. Fearing, "Microfabricated hinges," Sensors and Actuators A, vol. 33, pp. 229-236, June 1992.
-
(1992)
Sensors and Actuators A
, vol.33
, pp. 229-236
-
-
Pister, J.K.S.J.1
Judy, M.W.2
Burgett, S.R.3
Fearing, R.S.4
-
10
-
-
0000610288
-
Towards an articulated silicon microrobot
-
[101 R. Yen, E. J. J. Kruglick, and K. S. J. Pister, "Towards an articulated silicon microrobot," in Proc. ASME Winter Ann. Meet., Micromechanical Syst., 1994, vol. 55-2, pp. 747-754.
-
(1994)
Proc. ASME Winter Ann. Meet., Micromechanical Syst.
, vol.55
, Issue.2
, pp. 747-754
-
-
Yen, R.1
Kruglick, E.J.J.2
Pister, K.S.J.3
-
11
-
-
5344232563
-
Surface micromachined microelectromechanical components for articulated microrobots
-
Stockholm, Sweden, June 25-29
-
_, "Surface micromachined microelectromechanical components for articulated microrobots," presented at the 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95), Stockholm, Sweden, June 25-29, 1995.
-
(1995)
8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95)
-
-
-
13
-
-
5344226103
-
-
More information can be found in the World Wide Web site of http://www.mcnc.org/HTML/ETD/MEMS/memshome.html
-
-
-
-
14
-
-
0029547758
-
Dynamics of polysilicon parallel-plate electrostatic actuators
-
Stockholm, Sweden, June 25-29
-
P. B. Chu, P. R. Nelson, M. L. Tachiki, and K. S. J. Pister, "Dynamics of polysilicon parallel-plate electrostatic actuators," presented at the 8th Int. Conf.Solid-State Sensors and Actuators (Transducers '95), Stockholm, Sweden, June 25-29, 1995.
-
(1995)
8th Int. Conf.Solid-State Sensors and Actuators (Transducers '95)
-
-
Chu, P.B.1
Nelson, P.R.2
Tachiki, M.L.3
Pister, K.S.J.4
-
15
-
-
0025723097
-
Microtribology related MEMS: Concepts, measurements, applications
-
Nara, Japan, Jan. 30-Feb. 2
-
R. Kaneko, "Microtribology related MEMS: Concepts, measurements, applications," in Proc. IEEE Workshop on Micro Electro Mechanical Syst., Nara, Japan, Jan. 30-Feb. 2, 1991, pp. 1-14.
-
(1991)
Proc. IEEE Workshop on Micro Electro Mechanical Syst.
, pp. 1-14
-
-
Kaneko, R.1
-
16
-
-
0001867861
-
Supercritical Carbon Dioxide Drying of Microstructures
-
G. T. Mulhern, D. S. Soane, and R. T. Howe, "Supercritical Carbon Dioxide Drying of Microstructures," in Tech. Dig. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), 1993, pp. 296-298.
-
(1993)
Tech. Dig. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
, pp. 296-298
-
-
Mulhern, G.T.1
Soane, D.S.2
Howe, R.T.3
-
17
-
-
0006572209
-
A heuristic approach to the electromechanical modeling of MEMS beams
-
M. R. Boyd, S. B. Crary, and M. D. Giles, "A heuristic approach to the electromechanical modeling of MEMS beams," in Proc. Solid-State Sensor and Actuator Workshop (Hilton Head '94), 1994, pp. 123-126.
-
(1994)
Proc. Solid-State Sensor and Actuator Workshop (Hilton Head '94)
, pp. 123-126
-
-
Boyd, M.R.1
Crary, S.B.2
Giles, M.D.3
-
18
-
-
0028098290
-
Analysis of closed-loop control of parallelplate electrostatic microgrippers
-
May 8-13
-
P. B. Chu and K. S. J. Pister, "Analysis of closed-loop control of parallelplate electrostatic microgrippers," in Proc. IEEE Int. Conf. Robotics and Automation, May 8-13, 1994, pp. 820-850.
-
(1994)
Proc. IEEE Int. Conf. Robotics and Automation
, pp. 820-850
-
-
Chu, P.B.1
Pister, K.S.J.2
-
19
-
-
5344233216
-
-
Cambridge, MA: MIT Press
-
T.S. Gray, Applied Electronics, A First Course in Electronics, Electron tubes, and Associated Circuits, 2nd ed. Cambridge, MA: MIT Press, 1995, pp. 153-155.
-
(1995)
Applied Electronics, a First Course in Electronics, Electron Tubes, and Associated Circuits, 2nd Ed.
, pp. 153-155
-
-
Gray, T.S.1
|