-
1
-
-
0026901642
-
A silicon-based moving-mirror optical switch
-
Aug.
-
M. F. Dautartas, A. M. Benzoni, Y. C. Chen, and G. E. Blonder, "A silicon-based moving-mirror optical switch," J. Lightwave Technol., vol. 10, pp. 1078-1085, Aug. 1992.
-
(1992)
J. Lightwave Technol.
, vol.10
, pp. 1078-1085
-
-
Dautartas, M.F.1
Benzoni, A.M.2
Chen, Y.C.3
Blonder, G.E.4
-
2
-
-
0030407468
-
Electrostatic micro torsion mirrors for an optical switch matrix
-
Dec.
-
H. Toshiyoshi and H. Fujita, "Electrostatic micro torsion mirrors for an optical switch matrix,"J. Microelectromechan. Syst., vol. 5, no. 4, pp. 231-237, Dec. 1996.
-
(1996)
J. Microelectromechan. Syst.
, vol.5
, Issue.4
, pp. 231-237
-
-
Toshiyoshi, H.1
Fujita, H.2
-
3
-
-
0031236013
-
Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications
-
Sept.
-
C. Marser, C. Thio, M.-A. Gretillat, N. F. de Rooji et al, "Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications,"J. Microelectromechan. Syst., vol. 6, no. 3, pp. 277-285, Sept. 1997.
-
(1997)
J. Microelectromechan. Syst.
, vol.6
, Issue.3
, pp. 277-285
-
-
Marser, C.1
Thio, C.2
Gretillat, M.-A.3
De Rooji, N.F.4
-
4
-
-
0029640489
-
Micro-opto mechanical switch integrated on silicon
-
Nov. 9
-
E. Ollier, P. Labeye, and F. A. Revol, "Micro-opto mechanical switch integrated on silicon,"Electron. Lett., vol. 31, no. 23, pp. 2003-2005, Nov. 9, 1995.
-
(1995)
Electron. Lett.
, vol.31
, Issue.23
, pp. 2003-2005
-
-
Ollier, E.1
Labeye, P.2
Revol, F.A.3
-
5
-
-
0000752237
-
Micromachined 1 × 2 optical-fiber switch
-
May
-
L. A. Field, D. L. Burriesci, P. R. Robrish, and R. C. Ruby, "Micromachined 1 × 2 optical-fiber switch,"Sensors and Actuators A (Physical), vol. A53, no. 1-3, pp. 311-316, May 1996.
-
(1996)
Sensors and Actuators A (Physical)
, vol.A53
, Issue.1-3
, pp. 311-316
-
-
Field, L.A.1
Burriesci, D.L.2
Robrish, P.R.3
Ruby, R.C.4
-
6
-
-
3643105252
-
Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects
-
Apr.
-
L. Y. Lin, E. L. Goldstein, J. M. Simmona, and R. W. Tkach, "Free-space micromachined optical switches with submillisecond switching time for large-scale optical crossconnects,"IEEE Photon. Technol. Lett., vol. 10, pp. 525-527, Apr. 1998.
-
(1998)
IEEE Photon. Technol. Lett.
, vol.10
, pp. 525-527
-
-
Lin, L.Y.1
Goldstein, E.L.2
Simmona, J.M.3
Tkach, R.W.4
-
7
-
-
0032026267
-
Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning
-
Mar.
-
M. H. Kiang, O. Solgaard, K. Y. Lau, and R. S. Muller, "Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning,"J. Microelectromechan. Syst., vol. 7, no. 1, pp. 27-37, Mar. 1998.
-
(1998)
J. Microelectromechan. Syst.
, vol.7
, Issue.1
, pp. 27-37
-
-
Kiang, M.H.1
Solgaard, O.2
Lau, K.Y.3
Muller, R.S.4
-
8
-
-
0028731223
-
Micro-machined three-dimensional micro-optics for integrated free-space optical system
-
Dec.
-
L. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, "Micro-machined three-dimensional micro-optics for integrated free-space optical system,"IEEE Photon. Technol. Lett., vol. 6, Dec. 1994.
-
(1994)
IEEE Photon. Technol. Lett.
, vol.6
-
-
Lin, L.Y.1
Lee, S.S.2
Pister, K.S.J.3
Wu, M.C.4
-
9
-
-
0029640310
-
Surface-micromachined free-space micro-optical systems containing three-dimensional micro-gratings
-
Oct.
-
S. S. Lee, L. Y. Lin, and M. C. Wu, "Surface-micromachined free-space micro-optical systems containing three-dimensional micro-gratings,"Appl. Phys. Lett., vol. 67, no. 15, pp. 2135-2137, Oct. 1995.
-
(1995)
Appl. Phys. Lett.
, vol.67
, Issue.15
, pp. 2135-2137
-
-
Lee, S.S.1
Lin, L.Y.2
Wu, M.C.3
-
10
-
-
0030650554
-
Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication
-
Chicago, IL, June 16-19
-
S. S. Lee and M. C. Wu, "Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication," in Proc. Tech. Dig. 1997 Int. Solid-State Sensors and Actuators Conf. - TRANSDUCERS'97, Chicago, IL, June 16-19, 1997, vol. I, pp. 85-88.
-
(1997)
Proc. Tech. Dig. 1997 Int. Solid-State Sensors and Actuators Conf. - TRANSDUCERS'97
, vol.1
, pp. 85-88
-
-
Lee, S.S.1
Wu, M.C.2
-
11
-
-
0026881818
-
Microfabricated hinges
-
K. S. J. Pister, M. W. Judy, S. R. Burgett, and R. S. Fearing, "Microfabricated hinges,"Sensors and Actuators A (Physical), vol. 33, no. 3, p. 249, 1992.
-
(1992)
Sensors and Actuators A (Physical)
, vol.33
, Issue.3
, pp. 249
-
-
Pister, K.S.J.1
Judy, M.W.2
Burgett, S.R.3
Fearing, R.S.4
-
12
-
-
0031098222
-
Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
-
Mar.
-
T. Akiyama, D. Collard, and H. Fujita, "Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS," J. Microelectromechan. Syst., vol. 6, no. 1, pp. 10-17, Mar. 1997.
-
(1997)
J. Microelectromechan. Syst.
, vol.6
, Issue.1
, pp. 10-17
-
-
Akiyama, T.1
Collard, D.2
Fujita, H.3
-
13
-
-
0031636974
-
MEMS packaging for micro mirror switch
-
Seattle, WA, May 25-28
-
L.-S. Huang, S. S. Lee, E. Motamedi, M. C. Wu, and C.-J. Kim, "MEMS packaging for micro mirror switch," in Proc. 48th IEEE Electron. Components Technol. Conf., Seattle, WA, May 25-28, 1998.
-
(1998)
Proc. 48th IEEE Electron. Components Technol. Conf.
-
-
Huang, L.-S.1
Lee, S.S.2
Motamedi, E.3
Wu, M.C.4
Kim, C.-J.5
-
14
-
-
0000079019
-
Alignment of mask patterns to crystal orientation
-
May
-
G. Ensell, "Alignment of mask patterns to crystal orientation,"Sensors and Actuators A (Physical), vol. A53, nos. 1-3, pp. 345-348, May 1996.
-
(1996)
Sensors and Actuators A (Physical)
, vol.A53
, Issue.1-3
, pp. 345-348
-
-
Ensell, G.1
|