Operation of surface-tension self-assembled 3D micro-optomechanical torsion mirror scanner

Electronics Letters

Volumn 35, Issue 14, 1999, Pages 1157-1158

  Syms, R R A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; ETCHING; HELIUM NEON LASERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; PHOTORESISTS; SILICON ON INSULATOR TECHNOLOGY; SURFACE TENSION; TORQUE;

ELECTROSTATIC COMB DRIVE; ELECTROSTATICALLY DRIVEN MIRROR SCANNER; MICROOPTOMECHANICAL RESONANT TORSION MIRROR SCANNER;

OPTOELECTRONIC DEVICES;

EID: 0032632955     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19990833     Document Type: Article

References (6)

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2. LIN, L.Y., LEE, S.S., PISTER, K.S.J., and WU, M.C.: 'Three-dimensional micro-Fresnel optical elements fabricated by micromachining techniques', Electron. Lett., 1994, 30, pp. 448-449
3. KIANG, M.-H., SOLGAARD, O., LAU, K.Y., and MULLER, R.S.: 'Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning', J. Microelectromech. Syst., 1998, 7, pp. 27-37
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5. TIEN, N.C., SOLGAARD, O., KIANG, M.H., DANEMAN, M., LAU, K.Y., and MULLER, R.S.: 'Surface micromachined mirrors for laser-beam positioning', Sens. Actuators, 1996, A52, pp. 76-80
6. SYMS, R.R.A., and YEATMAN, E.M.: 'Self-assembly of fully three-dimensional microstructures using rotation by surface tension forces', Electron. Lett., 1993, 29, pp. 662-664