Linear microvibromotor for positioning optical components

Journal of Microelectromechanical Systems

Volumn 5, Issue 3, 1996, Pages 159-165

  Daneman, Michael J ^b,c   Tien, Norman C ^a,b,d,e,f,g   Solgaard, Olav ^a,b,h,i,j,k   Pisano, Albert P ^{a,b,l,m,n,o,p,q}   Lau, Kam Y ^{a,b,e,l,r,s,t,u}   Muller, Richard S ^a,b,e,r,v,w  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^d UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^e UNIVERSITY OF CALIFORNIA   (United States)

^f UNIVERSITY OF CALIFORNIA   (United States)

^g Silicon Proc Devmt Engineer P   (United States)

^h NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

ⁱ STANFORD UNIVERSITY   (United States)

^j University of California   (United States)

^k Columbia University ^*

^l Och Spine at New York Presbyterian Hospitals

^m UNIVERSITY OF CALIFORNIA   (United States)

ⁿ PALO ALTO RESEARCH CENTER   (United States)

^o GM Research Lab   (United States)

^p ASME

^q Dept Micro Mech Syst Engineers D

^r CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^s NOKIA RESEARCH CENTER   (United States)

^t IBM   (United States)

^u OPTICAL SOCIETY OF AMERICA   (United States)

^v STEVENS INSTITUTE OF TECHNOLOGY   (United States)

^w NATIONAL ACADEMY OF ENGINEERING   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; MICROMACHINING; OPTICAL DEVICES; OPTIMIZATION; POSITION CONTROL;

LINEAR MICROVIBROMOTOR; MICROOPTICAL SYSTEMS; OPTICAL COMPONENTS; SUBMICRON POSITIONING RESOLUTION; SURFACE MICROMACHINING TECHNOLOGY; TRAVEL RANGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0030246625     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.536622     Document Type: Article

References (10)

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