Micromachining for optical and optoelectronic systems

Proceedings of the IEEE

Volumn 85, Issue 11, 1997, Pages 1833-1856

  Wu Ming, C ^a,b,c  

^a University of California   (United States)

^b OFFICE OF NAVAL RESEARCH   (United States)

^c OPTICAL SOCIETY OF AMERICA   (United States)

Author keywords

Integrated optics; Integrated optoelectronics; Microelectromechanical devices; Optical switches

Indexed keywords

INTEGRATED OPTOELECTRONICS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; OPTICAL SWITCHES; OPTICAL SYSTEMS; SUBSTRATES;

MICROOPTOELECTROMECHANICAL SYSTEMS; MICROOPTOMECHANICAL SYSTEMS; OPTOELECTRONIC SYSTEMS;

INTEGRATED OPTICS;

EID: 0031268305     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.649660     Document Type: Article

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