Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 373-383

  Smela, Elisabeth ^a   Kallenbach, Matthias ^b   Holdenried, Jens ^c  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); ELECTROCHEMISTRY; MICROELECTROMECHANICAL DEVICES; ORGANIC POLYMERS; OXIDATION; PLASTIC FILMS; PLATE METAL; POLYPYRROLES; REACTIVE ION ETCHING; SILICON;

SILICON PLATES;

MICROACTUATORS;

EID: 0033342941     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809051     Document Type: Article

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