Prototype microrobots for micro-positioning and micro-unmanned vehicles

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 132-137

  Kladitis, Paul E ^a   Bright, Victor M ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); INDIUM; LIQUID METALS; MICROMACHINING; MOBILE ROBOTS; MOTION CONTROL; POSITION CONTROL; SURFACE TENSION;

ELECTRO-THERMAL ACTUATORS; MICRO-POSITIONING VEHICLES; MICRO-UNMANNED VEHICLES; MICROROBOTS;

MICROACTUATORS;

EID: 0033903377     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00258-7     Document Type: Article

References (20)

1. Dario P., Valleggi R., Carrozza M.C., Montesi M.C., Cocco M. Microactuators for microrobots: a critical survey. Journal of Micromechanics and Microengineering. 2(3):1992;141-157.
2. S. Johansson, Micromanipulation for micro- and nano-manufacturing, Proceedings of the INRIA/IEEE Symposium on Emerging Technologies and Factory Automation, Vol. 3, 1995, pp. 3-8.
3. Flynn M., Tavro L., Bart S., Brooks R., Ehrlich D., Udayakumar K., Cross L. Piezoelectric micromotors for microrobots. IEEE/ASME Journal of Microelectromechanical Systems. 1(1):1992;44-51.
4. Fukada T., Kawamoto A., Arai F., Matsuura H. Micro mobile robot in fluid (1st report, mechanism and swimming experiment of micro mobile robot in water). Transactions of the Japan Society of Mechanical Engineers, Part C. 60(569):1994;204-210.
5. C. Liu, T. Tsao, Y. Tai, W. Liu, P. Will, C. Ho, Micromachined permalloy magnetic actuator array for micro robotics assembly systems, Proceedings of the International Conference on Solid-State Sensors and Actuators, Eurosensors IX, Vol. 1, 1995, pp. 328-331.
6. I. Shimoyama, Y. Kubo, T. Kaneda, H. Miura, Simple microflight mechanism on silicon wafer, Proceedings of the IEEE MEMS Workshop, 1994, pp. 148-152.
7. Yasuda T., Shimoyama I., Miura H. Microrobot actuated by a vibration energy field. Sensors and Actuators, A: Physical. 43(1):1994;366-370.
8. R. Yeh, E. Kruglick, K. Pister, Towards an articulated silicon microrobot, Proceedings of ASME Dynamic Systems and Control, Vol. 2, 1994, pp. 747-754.
9. Yeh R., Kruglick E.J.J., Pister K.S.J. Surface-micromachined components for articulated microrobots. IEEE/ASME Journal of Microelectromechanical Systems. 5(1):1996;10-17.
10. Teshigahara A., Watanabe M., Kawahara N., Ohtsuka Y., Hattori T. Performance of a 7-mm microfabricated car. IEEE/ASME Journal of Microelectromechanical Systems. 4(2):1995;76-80.
11. Suzuki K., Shimoyama I., Miura H. Insect-model based microrobot with elastic hinges. IEEE/ASME Journal of Microelectromechanical Systems. 3(1):1994;4-9.
12. K. Suzuki, I. Shimoyama, H. Miura, Y. Ezura, Creation of an insect based microrobot with an external skeleton and elastic joints, Proceedings of the IEEE MEMS Workshop, 1992, pp. 190-195.
13. Ataka M., Omofsks S., Takeshima N., Fujita H. Fabrication and operation of polyimide bimorph actuators for a ciliary motion. IEEE/ASME Journal of Microelectromechanical Systems. 2(4):1993;146-150.
14. D. Koester, R. Mahadevan, K. Markus, SmartMUMPs design handbook including MUMPs introduction and design rules, rev. 4, DARPA project (DABT 63-93-C-0051) of MEMS Technology Applications Center MCNC, 3021 Cornwallis Road, Research Triangle Park, NC 27709, 1996.
15. Comtois J.H., Bright V.M. Applications for surface micromachined polysilicon thermal actuators and arrays. Sensors and Actuators, A: Physical. 58:1997;19-25.
16. Syms R.R.A. Equilibrium of hinged and hingeless structures rotated using surface tension forces. Journal of Microelectromechanical Systems. 4(4):1995;177-184.
17. Green P.W., Syms R.R.A., Yeatman E.M. Demonstration of three-dimensional microstructure self-assembly. Journal of Microelectromechanical Systems. 4(4):1995;170-176.
18. K. Harsh, R. Irwin, Y.C. Lee, Solder self assembly for MEMS, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 1998, pp. 249-255.
19. Harsh K., Lee Y.C. Modeling for solder self-assembled MEMS. Proceedings of SPIE. 3289:1998;177-184.
20. P.E. Kladitis, V.M. Bright, K.F. Harsh, Y.C. Lee, Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles, The 12th IEEE International Conference on MicroElectroMechanical Systems - MEMS '99, Orlando, FL, 17-21 January 1999, pp. 570-575.