Surface-micromachined micro-XYZ stages for free-space microoptical bench

IEEE Photonics Technology Letters

Volumn 9, Issue 3, 1997, Pages 345-347

  Lin, L Y ^a,b   Shen, J L ^b   Lee, S S ^b   Wu, M C ^a,b  

^a IEEE   (United States)

^b University of California   (United States)

Author keywords

Beam steering; Integrated optics; Microactuators; Microelectromechanical devices; Optical components; Optical device fabrication

Indexed keywords

ACTUATORS; LENSES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SURFACES;

BEAM STEERING; INTEGRATED SCRATCH DRIVE ACTUATORS; MICROACTUATORS; OPTICAL DEVICE FABRICATION; SURFACE MICROMACHINED PROCESS;

INTEGRATED OPTICS;

EID: 0031103563     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.556068     Document Type: Article

References (9)

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