Micro-flex mirror and instability actuation technique

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 470-475

  Garcia, Ernest J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; OPTICAL FIBER FABRICATION;

INSTABILITY ACTUATION TECHNIQUE; MICROFLEX MIRRORS;

MIRRORS;

EID: 0031654463     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)